2013
DOI: 10.1063/1.4846515
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Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

Abstract: We report on optomechanical GaAs disk resonators with ultrahigh quality factor -frequency product Q • f . Disks standing on a simple pedestal exhibit GHz breathing modes attaining a Q • f of 10 13 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation in this configuration. A new type of disk resonator integrating a shield within the pedestal is then proposed and its working principles and performances investigated by numerical simulations. For dimens… Show more

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Cited by 37 publications
(49 citation statements)
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References 22 publications
(55 reference statements)
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“…be realized in strongly pre-stressed resonators [197][198][199], novel materials such as crystalline diamond [200] or strained crystalline materials [201], or by suppressing clamping losses with suitable architectures [202][203][204]. The realization of large mechanical quality factors allows to address questions including the nonadiabatic dynamics of strongly coupled modes [205], the coherent control of the mechanical state [206,207] as well as a more thorough understanding of nanomechanical coherence [206,208,209].…”
Section: Nanomechanicsmentioning
confidence: 99%
“…be realized in strongly pre-stressed resonators [197][198][199], novel materials such as crystalline diamond [200] or strained crystalline materials [201], or by suppressing clamping losses with suitable architectures [202][203][204]. The realization of large mechanical quality factors allows to address questions including the nonadiabatic dynamics of strongly coupled modes [205], the coherent control of the mechanical state [206,207] as well as a more thorough understanding of nanomechanical coherence [206,208,209].…”
Section: Nanomechanicsmentioning
confidence: 99%
“…The radial-breathing modes having a node at the disk center, they naturally minimize clamping losses associated to the pedestal's displacement. If early work attempted to estimate the clamping of a disk resonator by semi-analytical means [17,18], a numerical FEM approach allows for direct predictive calculations [19,20]. It shows that the fundamental radial breathing mode at 1.4 GHz reaches for example a mechanical quality factor of 10 4 for a pedestal radius of 100 nm attainable in the fabrication.…”
Section: An Optical and Mechanical Resonatormentioning
confidence: 99%
“…The effect of air damping on the flexural motion of GaAs disks has been investigated to prepare their use in fluidic environment [34] and the air-damping of in-plane disk motion leads to a contributed Q in the 10 3 -10 4 range [35]. In GHz GaAs disks radial breathing modes, the measured mechanical Q saturates around 2.10 3 in air when it approaches the 10 4 limit under vacuum and at low temperature [20]. The best GaAs disks reach a mechanical Q × f product of 10 13 at low temperature in current measurements, limited by clamping losses at the pedestal [20].…”
Section: On-chip Integration Of Gaas Disksmentioning
confidence: 99%
“…The disks dimensions are 320 nm in thickness and 1.5 to 2 µm in radius. The pedestals are 1.7 µm high and their radii are smaller than 150 nm to minimize anchoring mechanical losses [33]. On the same chip, we include waveguides that address one, two and three disks in a unidirectional fashion.…”
mentioning
confidence: 99%
“…A picture of the complete sample structure is shown in the Supplemental Material ( gallery modes (WGMs) and mechanical radial breathing modes (RBMs) [31] that strongly couple through radiation pressure and photoelasticity, reaching an optomechanical coupling g 0 in the MHz range [32]. This enables fine optical control of mechanical motion in a large variety of physical environments, from cryogenic quantum operation to liquid immersion [33,34]. Monochromatic light at λ = 1.3 µm is evanescently coupled into the disks through integrated GaAs tapered waveguides [35], which also embed inverted tapers as input and output ports to suppress light back-reflections (see Supplemental Material Fig.…”
mentioning
confidence: 99%