High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE

Hùng, Vũ Ngọc; Abe, Takashi; Minh, Phan Ngoc; Esashi, Masayoshi

doi:10.1016/s0924-4247(03)00260-7

Cited by 34 publications

(18 citation statements)

References 12 publications

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“…Depending on the target frequency, QCM can commonly be fabricated on a quartz with a thickness ranging from 168 μm to 330 μm and a diameter of about 5 mm to 25 mm. Multichannel QCM sensors have been fabricated with diameters ranging from 0.05 to 1.0 mm on a quartz plate with dimension of 10 mm × 12 mm and distance between the resonators of about 1 mm [41]. Chemically stable metals such as gold and platinum are commonly used as the QCM electrodes.…”

Section: Acoustic Gas Sensorsmentioning

confidence: 99%

Advanced Micro- and Nano-Gas Sensor Technology: A Review

Nazemi

Joseph

Park

et al. 2019

Sensors

448

243

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Micro- and nano-sensors lie at the heart of critical innovation in fields ranging from medical to environmental sciences. In recent years, there has been a significant improvement in sensor design along with the advances in micro- and nano-fabrication technology and the use of newly designed materials, leading to the development of high-performance gas sensors. Advanced micro- and nano-fabrication technology enables miniaturization of these sensors into micro-sized gas sensor arrays while maintaining the sensing performance. These capabilities facilitate the development of miniaturized integrated gas sensor arrays that enhance both sensor sensitivity and selectivity towards various analytes. In the past, several micro- and nano-gas sensors have been proposed and investigated where each type of sensor exhibits various advantages and limitations in sensing resolution, operating power, response, and recovery time. This paper presents an overview of the recent progress made in a wide range of gas-sensing technology. The sensing functionalizing materials, the advanced micro-machining fabrication methods, as well as their constraints on the sensor design, are discussed. The sensors’ working mechanisms and their structures and configurations are reviewed. Finally, the future development outlook and the potential applications made feasible by each category of the sensors are discussed.

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Section: Acoustic Gas Sensorsmentioning

confidence: 99%

Advanced Micro- and Nano-Gas Sensor Technology: A Review

Nazemi

Joseph

Park

et al. 2019

Sensors

448

243

View full text Add to dashboard Cite

show abstract

“…In this case, a quartz crystal is sandwiched in between two electrodes, so that when an external electric field is applied, this generates a wave at the quartz’s resonant frequency [ 63 ]. Resonant frequencies of the crystal are inversely proportional to the its thickness; hence, thin crystal layers lead to higher frequencies and thus higher sensitivities of the sensor [ 64 ]. There exist other gravimetric devices that base their performance on the propagation of shared-horizontal acoustic waves through the piezoelectric crystal.…”

Section: Gas Sensors For Vocs Detectionmentioning

confidence: 99%

Advancements in Microfabricated Gas Sensors and Microanalytical Tools for the Sensitive and Selective Detection of Odors

Ollé

Farré-Lladós

Casals‐Terré

2020

Sensors

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In recent years, advancements in micromachining techniques and nanomaterials have enabled the fabrication of highly sensitive devices for the detection of odorous species. Recent efforts done in the miniaturization of gas sensors have contributed to obtain increasingly compact and portable devices. Besides, the implementation of new nanomaterials in the active layer of these devices is helping to optimize their performance and increase their sensitivity close to humans’ olfactory system. Nonetheless, a common concern of general-purpose gas sensors is their lack of selectivity towards multiple analytes. In recent years, advancements in microfabrication techniques and microfluidics have contributed to create new microanalytical tools, which represent a very good alternative to conventional analytical devices and sensor-array systems for the selective detection of odors. Hence, this paper presents a general overview of the recent advancements in microfabricated gas sensors and microanalytical devices for the sensitive and selective detection of volatile organic compounds (VOCs). The working principle of these devices, design requirements, implementation techniques, and the key parameters to optimize their performance are evaluated in this paper. The authors of this work intend to show the potential of combining both solutions in the creation of highly compact, low-cost, and easy-to-deploy platforms for odor monitoring.

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“…The lower electrode generates the RF bias at 2 MHz for active ions to acquire enough kinetic energy to break up the polymerized element on the surface into volatile ones. Therefore, compared to the normal planeparallel machines, two-electrode machines with two differrent frequencies have the advantage of controlling independently the etch radicals and the RF bias of the plasma [8,9].…”

Section: Dry-etch Process By Using a Dual-frequency High-density Plasmamentioning

confidence: 99%

Wafer-level fabrication of a high-silica v-groove for fiber-optic packaging using deep dry-etching with a dual-frequency high-density plasma

Ha¹,

Heo²,

Choi³

et al. 2015

Journal of the Korean Physical Society

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We developed a procedure for fabricating deep silica v-grooves of about 70 μm for fiber-optic applications by using a deep dry-etching with a dual-frequency high-density plasma source. This procedure has the advantages of sub-micron precision with wafer-level productivity and a high etching speed of 0.7 μm/sec. An electro-plated hard mask as thick as 8 μm that can endure the deep dry-etch was also developed. In particular, the angular inclination of the etched groove was controllable by using the flow of C4F8 gas. A fiber array block was assembled by using a v-groove chip. The location error of the fiber cores in the block was measured to be less than 0.3 μm. This confirms that the dry-etched silica v-grooves can be applied to the packaging of optical devices with wafer-level productivity and high precision. PACS numbers: 52.80.Pi, 52.70.Kz, 82.35.-x

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High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE

Cited by 34 publications

References 12 publications

Advanced Micro- and Nano-Gas Sensor Technology: A Review

Advanced Micro- and Nano-Gas Sensor Technology: A Review

Advancements in Microfabricated Gas Sensors and Microanalytical Tools for the Sensitive and Selective Detection of Odors

Wafer-level fabrication of a high-silica v-groove for fiber-optic packaging using deep dry-etching with a dual-frequency high-density plasma

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