This paper introduces recently developed active integrated probes for biomedical applications. To realize broadband cancer detection and low-power cancer ablation, planar-type coaxial probes have been integrated with active circuits for measurement and microwave generation, respectively. A multi-state reflectometer (MSR) is employed for cancer detection based on broadband permittivity characteristics. Also, to achieve microwave hyperthermia, a Kuband microwave source is integrated on the probe platform.
Each active integrated probe is implemented on a single silicon platform using Microelectromechanical Systems (MEMS) and monolithic microwave integrated circuit (MMIC) technologies for miniaturization and integration. Through the experiments, the feasibilities of the active integrated probes for microwave cancer detection and ablation have been validated.Index Terms -Active probe, complex permittivity, hyperthermia, microelectromechanical systems (MEMS), multistate reflectometer, open-ended coaxial probe.