1996
DOI: 10.1016/0038-1101(96)00038-x
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High frequency characteristics and modelling of p-type 6H-silicon carbide MOS structures

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Cited by 44 publications
(20 citation statements)
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“…In general, the C-f plots in the idealized case are frequency independent [12][13][14][15]. However, this idealized case is often disturbed due to the presence of the interface states at the interfacial layer and with the semiconductor interface [16][17][18][19]. At low ac signal, the charge is exchanged between the interface states and the semiconductor and so, the measured junction capacitance is the sum of the space charge and interface states capacitance [20].…”
Section: Resultsmentioning
confidence: 99%
“…In general, the C-f plots in the idealized case are frequency independent [12][13][14][15]. However, this idealized case is often disturbed due to the presence of the interface states at the interfacial layer and with the semiconductor interface [16][17][18][19]. At low ac signal, the charge is exchanged between the interface states and the semiconductor and so, the measured junction capacitance is the sum of the space charge and interface states capacitance [20].…”
Section: Resultsmentioning
confidence: 99%
“…At higher frequencies capacitance remains almost constant, while at the lower frequencies capacitance and conductance change. This means that at higher frequencies, the interface states cannot follow the AC signal [23] and consequently cannot contribute much to the capacitance. It indicates that the interface states are responsible for the observed frequency dispersion in C and G/ω curves.…”
Section: Resultsmentioning
confidence: 99%
“…4. The capacitance increases with decreasing frequency and this case indicates the presence of a continuous distribution of the interface states, leading to a progressive decrease of the response of the interface states to the applied alternating voltage [24,25]. At lower frequencies, the higher values of the capacitance are due to excess capacitance and this capacitance results from the interface states in equilibrium with the n-Si.…”
Section: Interface State Density Properties Of the Au/sio 2 /N-si/al mentioning
confidence: 91%