High efficiency silicon nitride surface grating couplers

Maire, Guillaume; Vivien, Laurent; Sattler, G.; Kaźmierczak, Andrzej; Sanchez, Benito; Gylfason, Kristinn B.; Griol, Amadeu; Marris‐Morini, Delphine; Cassan, Éric; Giannone, Domenico; Sohlström, Hans; Hill, Daniel

doi:10.1364/oe.16.000328

Cited by 81 publications

(43 citation statements)

References 16 publications

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“…47 Using DLW polymer photonic wirebonds for interchip communication have been demonstrated, 48 illustrating that waveguiding in DLW-written photonic components can be achieved with low loss. 50 Here we extend current photonic integrated circuits to full three dimensions by combining planar lithography with DLW. Using DLW allows us to realize circuit elements that cannot be fabricated with traditional methods as a powerful approach for next-generation on-chip optical components.…”

Section: Introductionmentioning

confidence: 99%

Hybrid 2D–3D optical devices for integrated optics by direct laser writing

Schumann

Bückmann

Gruhler³

et al. 2014

Light Sci Appl

151

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Integrated optical chips have already been established for application in optical communication. They also offer interesting future perspectives for integrated quantum optics on a chip. At present, however, they are mostly fabricated using essentially planar fabrication approaches like electron-beam lithography or UV optical lithography. Many further design options would arise if one had complete fabrication freedom in regard to the third dimension normal to the chip without having to give up the virtues and the know-how of existing planar fabrication technologies. As a step in this direction, we here use three-dimensional dip-in direct-laser-writing optical lithography to fabricate three-dimensional polymeric functional devices on pre-fabricated planar optical chips containing Si 3 N 4 waveguides as well as grating couplers made by standard electron-beam lithography. The first example is a polymeric dielectric rectangular-shaped waveguide which is connected to Si 3 N 4 waveguides and that is adiabatically twisted along its axis to achieve geometrical rotation of linear polarization on the chip. The rotator's broadband performance at around 1550 nm wavelength is verified by polarization-dependent grating couplers. Such polarization rotation on the optical chip cannot easily be achieved by other means. The second example is a whispering-gallery-mode optical resonator connected to Si 3 N 4 waveguides on the chip via polymeric waveguides. By mechanically connecting the latter to the disk, we can control the coupling to the resonator and, at the same time, guarantee mechanical stability of the three-dimensional architecture on the chip.

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Section: Introductionmentioning

confidence: 99%

Hybrid 2D–3D optical devices for integrated optics by direct laser writing

Schumann

Bückmann

Gruhler³

et al. 2014

Light Sci Appl

151

View full text Add to dashboard Cite

show abstract

“…3. While the lower index contrast of SiN limits grating efficiency, the insertion loss can be significantly improved with a thicker SiN layer [31], a backside mirror [32], a second deposited layer [33], or an additional (partial) etch step [34]. With a backside mirror (which could be integrated easily in this process), insertion loss of 2.6 dB has been demonstrated [32], and insertion loss of < 2 dB has been simulated [31] in a SiN single-etch process similar to this work.…”

Section: Fabrication and Passive Devicesmentioning

confidence: 99%

Room-temperature-deposited dielectrics and superconductors for integrated photonics

Shainline¹,

Buckley²,

Nader³

et al. 2017

Opt. Express

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We present an approach to fabrication and packaging of integrated photonic devices that utilizes waveguide and detector layers deposited at near-ambient temperature. All lithography is performed with a 365 nm i-line stepper, facilitating low cost and high scalability. We have shown low-loss SiN waveguides, high-Q ring resonators, critically coupled ring resonators, 50/50 beam splitters, Mach-Zehnder interferometers (MZIs) and a process-agnostic fiber packaging scheme. We have further explored the utility of this process for applications in nonlinear optics and quantum photonics. We demonstrate spectral tailoring and octave-spanning supercontinuum generation as well as the integration of superconducting nanowire single photon detectors with MZIs and channel-dropping filters. The packaging approach is suitable for operation up to 160 • C as well as below 1 K. The process is well suited for augmentation of existing foundry capabilities or as a stand-alone process.

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“…Currently, most works were focused on improving the coupling efficiency for a specific designed angle such as θ = 0 • [7] or θ = 10 • [8]. They suffer from a very tight angular tolerance with angular-full-width-halfmaximum (AFWHM) usually being 3 • [9] or 4 • [10]. In other words, the coupling efficiency decreases rapidly if θ deviates from the designed angle.…”

Section: Introductionmentioning

confidence: 99%

Unidirectionally optical coupling from free space into silicon waveguide with wide flat-top angular efficiency

Li¹,

Li²,

Xiao³

et al. 2012

Opt. Express

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Abstract:A grating coupling scheme from free-space light into silicon waveguide with a remarkable property of wide flat-top angular efficiency is proposed and theoretically investigated. The coupling structure is composed of two cascaded gratings with a proper distance between their peak angular efficiencies. A quantitative semi-analytical theory based on coupled-mode models is developed for performance prediction and validated with the fully vectorial aperiodic Fourier modal method (a-FMM). With the theory, wide flat-top angular response is achieved and the conditions are pointed out. Proof-of-principle demonstrations show that the -1 dB angular width, a figure of merit to evaluate the flat-top performance, is broadened to almost 3 to 4 times, and meanwhile the -3 dB angular width, i.e., angular-fullwidth-half-maximum (AFWHM), is widened to nearly more than twice, compared with the reference gratings composed of the same number of periodic defects. We believe this work will find applications in biological or chemical sensing and novel optical devices.

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High efficiency silicon nitride surface grating couplers

Cited by 81 publications

References 16 publications

Hybrid 2D–3D optical devices for integrated optics by direct laser writing

Hybrid 2D–3D optical devices for integrated optics by direct laser writing

Room-temperature-deposited dielectrics and superconductors for integrated photonics

Unidirectionally optical coupling from free space into silicon waveguide with wide flat-top angular efficiency

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