High brightness harmonic generation at 13�nm using self-guided and chirped femtosecond laser pulses

Kim, H.T.; Kim, I.J.; Toşa, V.; Lee, Y.S.; Nam, Chang Hee

doi:10.1007/s00340-004-1456-z

Cited by 28 publications

(26 citation statements)

References 15 publications

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“…All individually quasi-monochromatic harmonics propagate collinearly with the incident laser beam. The latter can be efficiently blocked by a thin metal filter which is transparent to the generated EUV radiation [134]. In order to prepare a beam which contains only a few or even single harmonics, multilayer mirrors with a wavelength-selective reflectivity are used [135].…”

Section: B E a M T R A N S P O R T O F H I G H H A R M O N I C Smentioning

confidence: 99%

Radiation characteristics of extreme UV and soft X-ray sources

Mey¹

2015

Göttingen Series in X-Ray Physics

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Section: B E a M T R A N S P O R T O F H I G H H A R M O N I C Smentioning

confidence: 99%

Radiation characteristics of extreme UV and soft X-ray sources

Mey¹

2015

Göttingen Series in X-Ray Physics

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“…The pumping laser, for generation of high harmonics, with pulses of 27-fs duration and wavelength centered at 827 nm was focused using a spherical mirror (f = 0.6 m) onto a neon gas jet with a 9-mm slit nozzle. The peak intensity was about 2×10 15 W/cm 2 for energy of 2 mJ [9]. The peak gas density was about 40 Torr.…”

Section: Using New Types Of Coherent X-ray Sourcesmentioning

confidence: 99%

Double Lloyd's mirror: versatile instrument for XUV surface interferometry and interferometric microscopy

et al. 2005

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We have developed a double Lloyd's mirror wavefront-splitting interferometer, constituting a compact device for surface probing in the XUV and soft X-ray spectral domain. The device consists of two independently adjustable superpolished flat surfaces, operated under grazing incidence angle to reflect a diverging or parallel beam. When the mirrors are appropriately inclined to each other, the structure produces interference fringes at the required distance and with tuneable fringe period. The double Lloyd's mirror may be used alone for surface topography with nanometric altitude resolution, or in conjunction with an imaging element for interferometric XUV surface microscopy. In the latter case, resolution in the plane of the probed surface is about micron, which is given by the quality of the imaging element and/or by the detector pixel size. Here, we present results obtained using the double Lloyd's mirror in two separate X-ray laser and high harmonics generation (HHG) application projects. The first experiment was aimed at understanding microscopic nature of the effects involved in laserinduced optical damage of thin pellicles, exposed to sub-ns laser pulses (438 nm) producing fluence of up to 10 Jcm -2 . The probing source in this case was a QSS neon-like zinc soft X-ray laser, proving a few mJ at 21.2 nm in ~100-ps pulses. The second experiment was carried out using a narrowly collimated HHG beam near 30 nm, employed to topographically probe the surface of a semiconductor chip.

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“…This development is motivated by the large field of applications as microscopy 1 , phase contrast imaging 2 and holography 3,4 . These sources have demonstrated a high brightness 5 and high degree spatial coherence 6 . However, for experiments concern phase imagining or tight focusing, EUV beam must have a high optical quality, and more precisely a diffracted limited wave front.…”

Section: Introductionmentioning

confidence: 99%

High order harmonics wavefront measurement and optimization

Gautier

Morlens

Zeitoun

et al. 2007

Advances in Metrology for X-Ray and EUV Optics II

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We present a full optimization of the high harmonics wave-front thanks to the use of a soft x-ray Hartmann sensor. The sensor was calibrated using high harmonics source with a λ/50 accuracy. We observed relatively good high harmonics wave-front, two times the diffraction-limit, with astigmatism as the dominant aberration for any interaction parameters. By slightly clipping the unfocused beam, it is possible to produce a diffraction-limited beam containing about 90% of the incident energy. The influence of high harmonic generation parameters was also studied in particularly the influence of the infra-red wave-front. In particular we studied the correlation between the infrared wave-front use to create high harmonics and the high harmonic wave-front. We also report wave-front measurements of a high order harmonic beam into an x-ray laser plasma amplifier at 32.8 nm.

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High brightness harmonic generation at 13�nm using self-guided and chirped femtosecond laser pulses

Cited by 28 publications

References 15 publications

Radiation characteristics of extreme UV and soft X-ray sources

Radiation characteristics of extreme UV and soft X-ray sources

Double Lloyd's mirror: versatile instrument for XUV surface interferometry and interferometric microscopy

High order harmonics wavefront measurement and optimization

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