2015
DOI: 10.17875/gup2015-817
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Radiation characteristics of extreme UV and soft X-ray sources

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Cited by 2 publications
(2 citation statements)
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“…This evaluation assumes a fully coherent beam. The computation of secondmoment beam parameters from Hartmann data for soft X-ray radiation and the general agreement with caustic scan techniques (Mey et al, 2014;Mey, 2015) and PMMA imprints were reported by Flö ter et al 2010and Flö ter (2012). Further investigations of wavefront measurements in comparison with PMMA imprints are presented by Dziarzhytski et al (2016).…”
Section: Operation Principle 21 Hartmann Wavefront Sensorsupporting
confidence: 71%
“…This evaluation assumes a fully coherent beam. The computation of secondmoment beam parameters from Hartmann data for soft X-ray radiation and the general agreement with caustic scan techniques (Mey et al, 2014;Mey, 2015) and PMMA imprints were reported by Flö ter et al 2010and Flö ter (2012). Further investigations of wavefront measurements in comparison with PMMA imprints are presented by Dziarzhytski et al (2016).…”
Section: Operation Principle 21 Hartmann Wavefront Sensorsupporting
confidence: 71%
“…In order to reduce the exposure time, while still enabling high signal-to-noise ratios, a significant optimization of the EUV photon flux density at the sample is required. Part of the performed studies on the source optimization and characterization were conducted in close collaboration with T. Mey (Laser Laboratorium Göttingen), with some of the results presented in his work [171], as well as in Chapter 2. In the following, the possible strategies for improving the photon flux and discuss primary modifications to the source, which have been carried out after the experiments described in Chapters 2 -4.…”
Section: Future Prospects Euv Photon Flux Optimizationmentioning
confidence: 99%