Advances in Metrology for X-Ray and EUV Optics II 2007
DOI: 10.1117/12.732339
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High order harmonics wavefront measurement and optimization

Abstract: We present a full optimization of the high harmonics wave-front thanks to the use of a soft x-ray Hartmann sensor. The sensor was calibrated using high harmonics source with a λ/50 accuracy. We observed relatively good high harmonics wave-front, two times the diffraction-limit, with astigmatism as the dominant aberration for any interaction parameters. By slightly clipping the unfocused beam, it is possible to produce a diffraction-limited beam containing about 90% of the incident energy. The influence of high… Show more

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