Heteroepitaxial Growth of c-Axis-Oriented BaTiO₃ Thin Films with an Atomically Smooth Surface

Abstract

C-axis-oriented barium titanate (BaTiO3) epitaxial films with an atomically smooth surface have been fabricated on SrTiO3{100} substrates using the pulsed laser deposition technique. The crystal structure and epitaxial orientation of the films have been analyzed by means of 2θ/θ X-ray diffractometry and 4-circle X-ray diffractometry. The highly oriented and epitaxial crystallinity is also shown by means of Rutherford backscattering spectrometry which gave a χmin of 1.7%. The atomically smooth surface comparable to that of the SrTiO3 substrate is revealed by means of atomic force microscopy. The breakdown electric field of the BaTiO3 film is as high as 106 V/cm.

Structural and optical characterization of epitaxial waveguiding BaTiO3 thin films on MgO

“…Scarfone et al 11 found min ϭ20% in 70 nm thick BaTiO 3 films on MgO. Values as low as min ϭ1.7% have only been observed for BaTiO 3 on the structurally similar SrTiO 3 substrates by Gong et al 12 In good agreement with this reference, we have observed min values around 2% for BaTiO 3 films deposited on SrTiO 3 . The deposition parameters for films on SrTiO 3 were the same as those on MgO.…”

In situ stress measurements during pulsed laser deposition of BaTiO3 and SrTiO3 atomic layers on Pt(001)

“…Structure studies of bulk BaTiO 3 and SrTiO 3 started some 70 years ago [8][9][10], and thin film growth by pulsed laser deposition (PLD) was realized more than 20 years ago [11][12][13]. In spite of this long tradition of the study of these prototypical perovskite materials, many fundamental question are still open, especially for thin films in the nm thickness range.…”

Properties of MTiO3(M = Sr, Ba) and PbM'O3(M'= Ti, Zr) Superlattice Thin Films Fabricated by Laser Ablation

“…[13][14][15][16][17] This technique is distinguished by a short pulse duration, a short wavelength, and a huge energy flux of the laser beam used for PLD. The deposition process is accomplished by sitting on the substrate of a plume of ionized and ejected material which is produced by high-intensity laser irradiation of a solid target.…”