“…As is well known, plasma-processing technology has become a key technology in semiconductor, microelectronics, materials, medical and other industries and has shown its good economic and environmental benefits. Compared with the plasma produced by discharge under low pressure, the plasma produced by discharge at atmospheric pressure has the advantages of high production efficiency, realizing continuous production and low cost because it provides a chamber-free and low-cost route for industrial applications [ 1 , 2 , 3 ]. Among the various forms of atmospheric discharge [ 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 ], atmospheric pressure glow discharge (APGD) has become a research hotspot because of its volume and uniformity.…”