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2007
DOI: 10.1016/j.fusengdes.2007.04.026
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Helium and hydrogen trapping in tungsten deposition layers formed by helium plasma sputtering

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Cited by 21 publications
(15 citation statements)
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“…It was reported in [12], that although not measurable, the deuterium content in co-deposited tungsten layers should be below a few percent. In contrast, a more recent study [13], found H/W values of about 0.15 for a tungsten layer formed in a hydrogen plasma.…”
Section: Introductionmentioning
confidence: 76%
“…It was reported in [12], that although not measurable, the deuterium content in co-deposited tungsten layers should be below a few percent. In contrast, a more recent study [13], found H/W values of about 0.15 for a tungsten layer formed in a hydrogen plasma.…”
Section: Introductionmentioning
confidence: 76%
“…It was therefore concluded that the concentration of D atoms in the W deposition layer was below a few percent [4]. On the other hand, in W layers deposited in a hydrogen RF plasma at a substrate temperature of about 430 K, the ratio of hydrogen to tungsten atoms was observed to be 0.15 H/W [5]. A study of the influence of the deposition conditions on the deuterium retention in codeposited W layers formed by both magnetron sputtering and in the PISCES-B linear device [6] showed that the D concentration decreased with increasing deposition rate and increasing temperature, and increased for increasing energy of the impinging particles.…”
Section: Introductionmentioning
confidence: 96%
“…[3] and references therein). However, only limited experimental investigations aimed at understanding hydrogen isotope retention in W layers deposited on collector probes due to sputtering of W targets with deuterium ions [4] and hydrogen and deuterium plasmas [5,6] have been performed. In experiments with 1.5 keV D ions no co-deposition of reflected deuterium with sputtered tungsten was observed at room temperature.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, hydrogen behavior in tungsten deposits is not necessarily the same as that in tungsten bulk. In order to investigate basic behaviors of hydrogen isotopes in tungsten deposits, the present authors have produced tungsten deposit samples by an RF plasma sputtering device [1][2][3][4]. It have been reported in previous papers that the produced tungsten deposits contain a numerous bubbles and retain a large amount of hydrogen isotopes [3].…”
Section: Introductionmentioning
confidence: 99%