2017
DOI: 10.1109/tns.2016.2616921
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Heavy Ion Induced Degradation in SiC Schottky Diodes: Bias and Energy Deposition Dependence

Abstract: -Experimental results on ion-induced leakage current increase in 4H-SiC Schottky power diodes are presented. Monte Carlo and TCAD simulations show that degradation is due to the synergy between applied bias and ion energy deposition. This degradation is possibly related to thermal spot annealing at the metal semiconductor interface. This thermal annealing leads to an inhomogeneity of the Schottky barrier that could be responsible for the increase leakage current as a function of fluence.

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Cited by 68 publications
(59 citation statements)
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“…At higher voltages, the difference becomes smaller. Nevertheless, these data illustrate the fact that the degradation rate depends strongly on the bias voltage, as reported earlier in [15].…”
Section: Resultssupporting
confidence: 86%
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“…At higher voltages, the difference becomes smaller. Nevertheless, these data illustrate the fact that the degradation rate depends strongly on the bias voltage, as reported earlier in [15].…”
Section: Resultssupporting
confidence: 86%
“…Heavy-ion exposure has been shown to increase reverse leakage current in SiC Schottky diodes, when a sufficient reverse bias is applied during radiation exposure [6], [7], [15]. When an ion beam hits the device at an angle off normal incidence, a similar, but weaker, effect is observed [11].…”
Section: Resultsmentioning
confidence: 98%
“…3 for a very low ion flux. Significant discrete increases in leakage current are evident for individual ion strikes, consistent with earlier experiments [9,10]. Leakage current increases as long as the beam is on.…”
Section: Introductionsupporting
confidence: 87%
“…In addition, efficient Schottky switching diodes in SiC can be manufactured that exhibit very low on-state voltage and minimal turn-off switching loss with almost no reverserecovery behavior, which makes SiC a good candidate for space power conversion applications. However, the sensitivity of SiC power devices (MOSFETs and diodes) to particle radiation has been found to be higher than expected, given the wide bandgap and high critical electric field, as shown by multiple researchers who have consistently measured significant leakage current increases and single-event burnout in SiC devices [1][2][3][4][5][6][7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
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