HDL modeling of convective accelerometers for system design and optimization

Leman, O.; Mailly, F.; Latorre, Laurent; Nouet, Pascal

doi:10.1016/j.sna.2007.07.034

Cited by 26 publications

(19 citation statements)

References 9 publications

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“…The study and modeling of the convective accelerometer sensor was presented earlier [10,13]. Using FEM simulations and silicon characterization results, the model of Fig.…”

Section: Convective Accelerometer Modelingmentioning

confidence: 99%

“…The first part of this paper recalls the main results of our previous work [10,13] on the behavioral modeling of the convective accelerometer. In the second part, we propose the electronic design of a convective accelerometer with thermal sigma-delta modulator conditioning.…”

Section: Introductionmentioning

confidence: 98%

“…Many studies report the design and optimization of openloop convective accelerometers [1][2][3][4][5][6][7][8][9][10] but very few of them address the conditioning electronics as a solution to improve the system overall performance. In most of the previous works, an open-loop and continuous time read-out circuit is used on the basis of a simple instrumentation amplifier.…”

Section: Introductionmentioning

confidence: 99%

“…Finally, we extensively discuss the noise behavior of the proposed system. As a foreword, we want to stress the point that we have experimentally validated the thermal sigma-delta modulator principle and the proposed behavioral model [10,12,13], giving strength to this study based on simulation results.…”

Section: Introductionmentioning

confidence: 99%

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Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

Leman

Mailly

Latorre

et al. 2009

Analog Integr Circ Sig Process

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This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal properties of the sensor, a first order sigma-delta modulator is built. This ''electro-physical'' modulator realizes an analog-to-digital conversion of the acceleration signal. Besides, the feedback mode of operation improves the sensor overall performance.

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“…The study and modeling of the convective accelerometer sensor was presented earlier [10,13]. Using FEM simulations and silicon characterization results, the model of Fig.…”

Section: Convective Accelerometer Modelingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

Leman

Mailly

Latorre

et al. 2009

Analog Integr Circ Sig Process

Self Cite

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“…This voltage is then amplified by an instrumentation amplifier (A1, G=100) based on standard operational amplifiers from the foundry design kit. Detailed information concerning the sensor manufacturing, modeling and experimental results can be found in previous publications from the authors [9][10][11]. The main drawback of this sensor was found to be the detectors' thermal inertia that limits the sensor bandwidth to few tens of hertz.…”

Section: System Under Test Overviewmentioning

confidence: 99%

Investigations on electrical-only test setup for MEMS convective accelerometer

Rekik

Azaïs

Dumas

et al. 2009

2009 3rd International Conference on Signals, Circuits and Systems (SCS)

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In this paper, we investigate potential solutions for the development of an electrical-only test procedure for MEMS convective accelerometers. The objective is to define an alternative low-cost test procedure applicable at wafer-level. Simple electrical test measurements are analyzed and a behavioral model allowing fault injection is developed. Simulation results show that most of the parametric faults that affect the device specifications can be detected with electrical measurements. Only faults that affect the convective behavior escape this alternative test. A preliminary study of convective effects using FEM simulation is then conducted to identify the key parameters that should be included in the model for the subsequent definition of adequate electrical test parameters.

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