Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

Leman, O.; Mailly, F.; Latorre, Laurent; Nouet, Pascal

doi:10.1007/s10470-009-9419-2

Cited by 5 publications

(3 citation statements)

References 14 publications

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“…By this, a closed-loop bandwidth of 1025Hz was attained using an usual thermal accelerometer of ~70Hz bandwidth. Another reported closed loop implementation is a thermal sigma-delta modulator having the thermo-electrical (first-order low-pass) response of the convective accelerometer as its loop-filter [91], [92]. This again provides an improved bandwidth, and also a direct digital output.…”

Section: Signal Conditioning For Thermal Accelerometersmentioning

confidence: 99%

A review of micromachined thermal accelerometers

Mukherjee¹,

Basu²,

Mandal³

et al. 2017

J. Micromech. Microeng.

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Thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and integrability with CMOS integrated circuit technology. This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling, and numerical simulation of such devices. Different reported varieties and structures of thermal accelerometers have been reviewed highlighting key design, implementation, and performance aspects. Materials and technologies used for fabrication of such sensors have also been discussed. Further, the advantages and challenges for thermal accelerometers vis-à-vis other prominent accelerometer types have been presented, followed by an overview of associated signal conditioning circuitry and potential applications.

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Section: Signal Conditioning For Thermal Accelerometersmentioning

confidence: 99%

A review of micromachined thermal accelerometers

Mukherjee¹,

Basu²,

Mandal³

et al. 2017

J. Micromech. Microeng.

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“…The operation of this type of sensor is based on the movement of a hot tiny air bubble generated from a heater. From then on, research has been carried out with focus on improving the sensor performance by optimizing the heat transfer , signal conditioning [26][27][28], behavior modelling [29][30][31][32], or fabrication process [33][34][35].…”

Section: Introductionmentioning

confidence: 99%

Tri-axis convective accelerometer with closed-loop heat source

Dau

Dinh

Tran

et al. 2018

Sensors and Actuators A: Physical

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In this paper, we report the details and findings of a study on tri-axis convective accelerometer, which is designed with the closed-loop type heat source and thermal sensing hotwire elements. The closed-loop heat source enhances the convective flow to the central part where a hotwire is placed to measure the vertical component of acceleration. The simulation was conducted using numerical analysis, and the device was prototyped by additive manufacturing. The device, functioning as a tilt sensor and an accelerometer, was tested up to acceleration of 20g.The experiments were successfully conducted and the experimental results agreed reasonably with those obtained by numerical analysis. The results demonstrated that the closed-loop heat source could reduce the cross effect between the acceleration components. The scale factor and cross-sensitivity had the values of 0.26 μV/g and 1.2%, respectively. The cross-sensitivity and the effects of heating power were also investigated in this study.

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“…Combinations of Finite-Element-Modeling (FEM) simulation and experimental validation are the most commonly-used research methods. The signal conditioning circuits were also investigated to improve the performances of the accelerometers [ 41 , 42 , 43 , 44 ]. In addition, the fabrication processes were optimized to ensure their compatibility with the mature micromachining process.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Fluid Inertial Sensors

Liu

Zhu

2017

Sensors

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Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly includes thermal accelerometers and fluid gyroscopes, which have now been developed since the end of the last century for about 20 years. Compared with conventional silicon or quartz inertial sensors, the fluid inertial sensors use a fluid instead of a solid proof mass as the moving and sensitive element, and thus offer advantages of simple structures, low cost, high shock resistance, and large measurement ranges while the sensitivity and bandwidth are not competitive. Many studies and various designs have been reported in the past two decades. This review firstly introduces the working principles of fluid inertial sensors, followed by the relevant research developments. The micromachined thermal accelerometers based on thermal convection have developed maturely and become commercialized. However, the micromachined fluid gyroscopes, which are based on jet flow or thermal flow, are less mature. The key issues and technologies of the thermal accelerometers, mainly including bandwidth, temperature compensation, monolithic integration of tri-axis accelerometers and strategies for high production yields are also summarized and discussed. For the micromachined fluid gyroscopes, improving integration and sensitivity, reducing thermal errors and cross coupling errors are the issues of most concern.

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Noise analysis of a first-order thermal ΣΔ architecture for convective accelerometers

Cited by 5 publications

References 14 publications

A review of micromachined thermal accelerometers

A review of micromachined thermal accelerometers

Tri-axis convective accelerometer with closed-loop heat source

Micromachined Fluid Inertial Sensors

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