Growth of niobium nitride/aluminium nitride trilayers and multilayers

Niobium nitride thin films deposited by high temperature chemical vapor deposition

“…Furthermore, little has been published on the orientation relationships between the NbN layer and the substrate. The most comprehensive work on orientation relationships has been done using the ALD technique [3] and the PVD technique [4,5]. As a first step to link the structure to the resulting properties of CVD NbN layers, we present in this contribution the synthesis …”

“…In the Nb-N phase diagram, five different crystallographic structures are admitted [1,4,9] : α-Nb (Nb with interstitial N), hexagonal close-packed (hcp) β-…”

Structural characterization of TiN/NbN multilayers: X‐ray diffraction, energy‐filtered TEM and Fresnel contrast techniques compared

“…XRD is commonly used to characterize multilayered materials (Fullerton et al ., 1992) and this is often combined with qualitative imaging of the structure by TEM. However, it is perhaps surprising that there has been very little quantitative comparison of the multilayer structural parameters determined from XRD with those determined from TEM techniques that are increasingly able to determine the same parameters on a local scale with similar precision (Lloyd, 1999; Lloyd & Dunin‐Borkowski, 1999; Lloyd et al ., 2001).…”

“…(1997, 1999) examined doped semiconductor layers but the resolution of the EFTEM images was poor and an automatic fitting procedure was not employed to analyse the Fresnel images. Automated fitting of the Fresnel data was used in the work of Lloyd et al . (2001) but only the ‘three‐window’ method was employed to construct elemental maps and it was not identical regions of specimen that were compared.…”

“…Given that the real potential is similar in each case, the decrease in absorption could be an artefact from surface damage layers. A high density of point defects would be expected to increase absorption, but these materials are intrinsically highly defective even in the crystalline regions (Lloyd et al ., 2001). Alternatively, the differences in absorption could be due to varying degrees of diffraction contrast.…”