2016
DOI: 10.1002/adem.201600226
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Superconducting Resonators Based on TiN/Tapering/NbN/Tapering/TiN Heterostructures

Abstract: We fabricated a type of superconducting heterostructures, TiN/tapering/NbN/tapering/TiN, on c-cut sapphire substrates by reactive magnetron sputtering. The goal is to achieve an x-band resonator that maintains a high Q in modest magnetic fields. The structure shows (111) orientation with local epitaxial correlation, as a result of stacking face-centered-cubic structures on top of hexagonal-closepacking substrates. The artificial tapering layers vary gradually from NbN into TiN and vice versa, creating a smooth… Show more

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Cited by 4 publications
(3 citation statements)
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“…Titanium nitride (TiN) thin films exhibit good chemical stability down to nanometer thickness [14] and are used in the fabrication of superconducting devices for photon detection [15] and for quantum information processing [16][17][18][19]. Low dielectric losses at microwave frequencies observed in TiN films are associated with a relatively small surface density of two-level systems defects that contribute to decoherence of the resonators and qubits [20][21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…Titanium nitride (TiN) thin films exhibit good chemical stability down to nanometer thickness [14] and are used in the fabrication of superconducting devices for photon detection [15] and for quantum information processing [16][17][18][19]. Low dielectric losses at microwave frequencies observed in TiN films are associated with a relatively small surface density of two-level systems defects that contribute to decoherence of the resonators and qubits [20][21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…Fully epitaxial Al (111) should display three-fold symmetry in the ϕ -scan of (200) planes. The appearance of six peaks indicates two symmetrically equivalent growth orientations (twins) occur in the Al layers, as a result of stacking three-fold symmetric fcc structures onto the six-fold symmetric hcp substrate 34 . The lower panel of Fig.…”
Section: Methodsmentioning
confidence: 99%
“…Maintaining a high quality factor is not straightforward in a magnetic field because of magnetic field depena) Electronic mail: kwon2866@gmail.com dent microwave losses. [36][37][38][39][40][41][42][43][44][45][46][47][48][49] The focus of this paper is to develop experimental methods to understand and characterize the magnetic field dependent loss mechanisms, quasiparticle generation and current-induced motion of vortices.…”
Section: Introductionmentioning
confidence: 99%