2007
DOI: 10.1016/j.jcrysgro.2007.09.030
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Growth of freestanding GaN using pillar-epitaxial lateral overgrowth from GaN nanocolumns

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Cited by 34 publications
(21 citation statements)
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“…To improve the efficiency of GaN-based devices, various strategies are employed with the aim to reduce the high dislocation densities inherent to the heteroepitaxial growth of GaN and avoiding polarization fields which are detrimental to optical devices [2,3]. However, these growth strategies often result in the formation of stacking faults: Especially the growth of non-and semi-polar GaN layers [4][5][6][7][8] as well as epitaxial-lateral overgrowth [9][10][11][12][13][14] or the coalescence overgrowth of nanowires [15][16][17][18] are associated with the formation of basal-plane stacking faults independent of which growth technique is used. As a consequence, the emission characteristics and transport properties of the layers are changed [11,19].…”
Section: Introductionmentioning
confidence: 99%
“…To improve the efficiency of GaN-based devices, various strategies are employed with the aim to reduce the high dislocation densities inherent to the heteroepitaxial growth of GaN and avoiding polarization fields which are detrimental to optical devices [2,3]. However, these growth strategies often result in the formation of stacking faults: Especially the growth of non-and semi-polar GaN layers [4][5][6][7][8] as well as epitaxial-lateral overgrowth [9][10][11][12][13][14] or the coalescence overgrowth of nanowires [15][16][17][18] are associated with the formation of basal-plane stacking faults independent of which growth technique is used. As a consequence, the emission characteristics and transport properties of the layers are changed [11,19].…”
Section: Introductionmentioning
confidence: 99%
“…This process continues until a complete layer of GaN is formed. In previous work, this technique has been successfully demonstrated for sapphire substrates [4][5][6][7][8][9][10][11][12], whereas there are only a few reports concerning Si as substrate [13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%
“…Several growth methods are employed to reduce the density of TDs, such as (a) growing a thick GaN film by halide chemical vapor epitaxy (HVPE) [7], (b) using a patterned substrate as a template substrate [8,9], (c) pillar-assisted epitaxial lateral overgrowth (PELO) along self-assembled nanorods [10], and (d) microchannel epitaxy (MCE) [11][12][13][14]. High quality epitaxial layers with a low density of TDs can therefore be achieved at the lateral overgrown regions where TDs cannot transfer from the substrate using growth methods (b) to (d).…”
Section: Introductionmentioning
confidence: 99%