1993
DOI: 10.1103/physrevb.47.9816
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Growth mechanism and the order of appearance of diamond (111) and (100) facets

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Cited by 93 publications
(21 citation statements)
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“…Actually, the color of plasma created was greenish corresponding to the Swan band emissions of C 2 molecules. It is reported that C 2 H 2 tends to form f1 1 1g facets [26,27], which might be one of the causes of the f1 1 1g-tilt facet formation at low C me range in the present study, although effects of C 2 H 2 density on R g increasing for diamond (1 0 0) films are unclear. We may find optimal growth conditions that satisfy both high quality and high growth rate in high level through understanding of the effect of each factor mentioned above on R g under the high C me conditions.…”
Section: High C Me Range ðC Me X4:0%þmentioning
confidence: 51%
“…Actually, the color of plasma created was greenish corresponding to the Swan band emissions of C 2 molecules. It is reported that C 2 H 2 tends to form f1 1 1g facets [26,27], which might be one of the causes of the f1 1 1g-tilt facet formation at low C me range in the present study, although effects of C 2 H 2 density on R g increasing for diamond (1 0 0) films are unclear. We may find optimal growth conditions that satisfy both high quality and high growth rate in high level through understanding of the effect of each factor mentioned above on R g under the high C me conditions.…”
Section: High C Me Range ðC Me X4:0%þmentioning
confidence: 51%
“…[51][52][53][54]57,58,[62][63][64][65][66][67] In order to clarify the origin of the peaks at 300, 450, and 600 meV, an ion irradiation experiment was performed on a well-defined diamond surface. [74,75] Ion irradiation results in partial amorphization of the film surface, so the change in the shape of the spectrum following the ion irradiation may be associated with the change of the surface crystalline structure.…”
Section: Hreels Mode Positionmentioning
confidence: 99%
“…With the increase of , the ratio of I Dia :I G decreases from 5.9, 1.7, 0.88, to 0.83, corresponding to no PMF, 10,000 rpm, 20,000 rpm and 30,000 rpm respectively, indicating growing amount of sp 2 phase. Considering that the sensitivity of sp 2 is about 50 times stronger than that of sp 3 [14], and the existence of sharp peak at 1332 cm −1 under PMF, we conclude that there remains large amount of sp 3 phase in the films. The decrease of intensity ratio from 10,000 to 20,000 rpm is much larger than that from 20,000 to 30,000 rpm implies that increasing the does not necessarily increase the amount of sp 2 phase obviously.…”
Section: Resultsmentioning
confidence: 87%