Green-tape ceramics. New technological approach for integrating electronics and fluidics in microsystems

Ibáñez-García, Núria; Alonso, J.; Martínez-Cisneros, Cynthia S.; Valdés, Francisco

doi:10.1016/j.trac.2007.11.002

Cited by 77 publications

(62 citation statements)

References 67 publications

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“…Finally, the laminated block is sintered in a programmable furnace, where different temperature profiles are applied. The whole process, which takes place in less than one day, is depicted in figure 1 and described in detail elsewhere [41].…”

Section: Microsystems Fabricationmentioning

confidence: 99%

Design, fabrication and characterization of microreactors for high temperature syntheses

Martínez-Cisneros

Pedro

Puyol

et al. 2012

Chemical Engineering Journal

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Microfluidic reactors offer many potential advantages in several research and industrial fields such as processes intensification, which includes a better reaction control (kinetics and thermodynamics), a high throughput and a safer operational environment (reduced manipulation of dangerous reagents and low sub-products generation). Nevertheless, scaling-down limitations appear concerning the materials used in the fabrication of microreactors for most of the liquid-phase reactions, since they usually require high temperatures (up to 300ºC), solvents and organic reagents. In this work, the development of a set of modular and monolithic microreactors based on the integration of microfluidics and a thermal platform (sensor/high-temperature heater) is proposed to perform high temperature reactions. The reliability and performance of both configurations were evaluated through an exhaustive characterization process regarding their thermal and microfluidic performance. Obtained results make the devices viable for their application in controlled and reproducible synthetic processes occurring at high temperatures such as the synthesis of quantum dots. The proposed microfluidic approach emerge as an engaging tool for processes intensification, since it provides better mass and temperature transfer than conventional methods with a reduction not only of the size and energy consumption, but also of by-products and reagents consumption.

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Section: Microsystems Fabricationmentioning

confidence: 99%

Design, fabrication and characterization of microreactors for high temperature syntheses

Martínez-Cisneros

Pedro

Puyol

et al. 2012

Chemical Engineering Journal

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“…The fabrication process regarding LTCC-based devices is described in detail elsewhere (Iban˜ ez-García et al, 2008). Fig.…”

Section: Ltcc Device Fabricationmentioning

confidence: 99%

Novel LTCC-potentiometric microfluidic device for biparametric analysis of organic compounds carrying plastic antibodies as ionophores: Application to sulfamethoxazole and trimethoprim

Almeida

Arasa

Puyol

et al. 2011

Biosensors and Bioelectronics

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A B S T R A C TMonitoring organic environmental contaminants is of crucial importance to ensure public health. This requires simple, portable and robust devices to carry out on-site analysis. For this purpose, a low-temperature co-fired ceramics (LTCC) microfluidic potentiometric device (LTCC/µPOT) was developed for the first time for an organic compound: sulfamethoxazole (SMX).Sensory materials relied on newly designed plastic antibodies. Sol-gel, self-assembling monolayer and molecular-imprinting techniques were merged for this purpose. Silica beads were amine-modified and linked to SMX via glutaraldehyde modification. Condensation polymerization was conducted around SMX to fill the vacant spaces. SMX was removed after, leaving behind imprinted sites of complementary shape. The obtained particles were used as ionophores in plasticized PVC membranes. The most suitable membrane composition was selected in steady-state assays. Its suitability to flow analysis was verified in flow-injection studies with regular tubular electrodes.The LTCC/µPOT device integrated a bidimensional mixer, an embedded reference electrode based on Ag/AgCl and an Ag-based contact screenprinted under a micromachined cavity of 600 µm depth. The sensing membranes were deposited over this contact and acted as indicating electrodes.Under optimum conditions, the SMX sensor displayed slopes of about −58.7 mV/decade in a range from 12.7 to 250 µg/mL, providing a detection limit of 3.85 µg/mL and a sampling throughput of 36 samples/h with a reagent consumption of 3.3 mL per sample.The system was adjusted later to multiple analyte detection by including a second potentiomet-ric cell on the LTCC/µPOT device. No additional reference electrode was required. This concept was applied to Trimethoprim (TMP), always administered concomitantly with sulphonamide drugs, and tested in fish-farming waters. The biparametric microanalyzer displayed Nernstian behaviour, with aver-age slopes −54.7 (SMX) and +57.8 (TMP) mV/decade. To demonstrate the microanalyzer capabilities for real applications, it was successfully applied to single and simultaneous determination of SMX and TMP in aquaculture waters.K e y w o r d s

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“…13 It consequently promotes the integration ability of electronic components, such as sensors, actuators and electrical packaging, in LTCC devices for realizing accurate process control and real-time automation. 14,15 Another advantage of LTCC for making microreactors is that their green tapes appear flexible and can be easily machined to create cavities via milling, 16 embossing, 17 laser cutting, 18 and use of sacrificial materials. 19 Through stacking and laminating these green tapes with cavities in 3D, these stacks can incorporate various embedded or open fluidic structures in the sub-mm scale, such as packed beds, 20 microchannels, 9 heat exchangers 21 and mixers, for desired chemical processes.…”

Section: Introductionmentioning

confidence: 99%

Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors

et al. 2015

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The development of microreactors that operate under harsh conditions is always of great interest for many applications. Here we present a microfabrication process based on low-temperature co-fired ceramic (LTCC) technology for producing microreactors which are able to perform chemical processes at elevated temperature (>400°C) and against concentrated harsh chemicals such as sodium hydroxide, sulfuric acid and hydrochloric acid. Various micro-scale cavities and/or fluidic channels were successfully fabricated in these microreactors using a set of combined and optimized LTCC manufacturing processes. Among them, it has been found that laser micromachining and multi-step low-pressure lamination are particularly critical to the fabrication and quality of these microreactors. Demonstration of LTCC microreactors with various embedded fluidic structures is illustrated with a number of examples, including micro-mixers for studies of exothermic reactions, multiple-injection microreactors for ionone production, and high-temperature microreactors for portable hydrogen generation. IntroductionChemical microreactors are a type of meso-scaled reaction systems that have fluidic channels with characteristic dimensions in the sub-millimeter range. By combining process intensification concepts with microfabrication techniques, these microreactors have been rapidly developed to perform liquid/gas phase chemical reactions, particularly the quasiinstantaneous endothermic or exothermic ones.1,2 Ceramic materials in general feature high chemical and thermal stability. Hence they are very preferable to be used as reactor construction materials, especially for reactors involved with high temperature and/or harsh chemical reactions. be used as the embedded fluidic structures (e.g. channels or cavities) get easily damaged in the stacked LTCC tapes by the high lamination temperature and/or pressure, causing sagging, tearing and cracking issues. Several approaches have been proposed so far in order to reduce these deformations and improve the quality of integrated LTCC fluidic structures. One method is using temporary inserts to introduce mechanical supports to the LTCC cavities to avoid deformation and/or sagging during lamination. These inserts, usually solid flexible objects, 23 are removed right after lamination. However, the removal of inserts from the laminate can cause permanent damage to these fluidic structures. Besides, this method is not applicable for fabricating fully embedded fluidic channels. Alternatively, a chemical-assisted lamination process has been proposed that enables low-pressure and/or lowtemperature bonding of LTCC green tapes. Roosen et al. 24used double-sided adhesive tape that contains acrylate adhesives and a polyethylene terephthalate (PET) film to ensure temporary binding of green tapes under a low lamination pressure at ambient temperature. Upon heating (40-60°C), these adhesives, together with the binders in the LTCC green tapes, soften and join the laminates through capillary forces. Aside from adhesives, ...

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Green-tape ceramics. New technological approach for integrating electronics and fluidics in microsystems

Cited by 77 publications

References 67 publications

Design, fabrication and characterization of microreactors for high temperature syntheses

Design, fabrication and characterization of microreactors for high temperature syntheses

Novel LTCC-potentiometric microfluidic device for biparametric analysis of organic compounds carrying plastic antibodies as ionophores: Application to sulfamethoxazole and trimethoprim

Fine structuration of low-temperature co-fired ceramic (LTCC) microreactors

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