Grating-Based Acceleration Sensors with Optical Interferometric Readout and Closed-Loop Control

et al. 2021

Sensors

The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2.

Section: Experiments and Resultsmentioning

confidence: 99%

Section: Simulation Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Design and Modification of a High-Resolution Optical Interferometer Accelerometer

Yao

Pan

et al. 2021

Sensors

“…Its mechanical thermal noise was 43.7 ng/√Hz, but was limited by the test environment (the total inherent noise floor was 24.4 µg/√Hz (at 1 kHz)). Williams et al [ 74 , 75 , 76 ] (2014) at the University of Texas at Austin and Silicon Audio developed a MEMS accelerometer based on the micro-grating sensor reported in [ 73 ]. It had a closed-loop feedback control and a size of ten cubic centimeters.…”

Section: Mems Accelerometers With Signal Readout Methods Of Highermentioning

confidence: 99%

“…Hz (at 1 kHz)). Williams et al [74][75][76] (2014) at the University of Texas at Austin and Silicon Audio developed a MEMS accelerometer based on the micro-grating sensor reported in [73]. It had a closed-loop feedback control and a size of ten cubic centimeters.…”

mentioning

confidence: 99%

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Chen

et al. 2020

Sensors

This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

Laser & Photonics Reviews

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.