1984
DOI: 10.1002/pssa.2210850235
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Grain Size and Temperature Dependence of the Electrical Behaviour of Polysilicon

Abstract: The effect of grain size (D) and temperature (T) on the electrical behaviour of polysilicon is investigated theoretically by considering a simplified carrier trapping model and an empirical expression for grain boundary trapping states density. The model presented applies well for all grain sizes over the entire range of doping concentration and temperature. The computed variations of electrical properties, such as resistivity and mobility, with D and T are seen to be in agreement with the experimental finding… Show more

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Cited by 5 publications
(2 citation statements)
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“…The basic concepts were developed with metals, where processing by hot and cold forming in combination with annealing is determinant in tuning their mechanical properties [39,40]. With a transfer of these concepts to classical semiconductors (Si, Ge), the attention focussed on the morphology dependence of the electrical properties [4,6,10,11], where advances of microelectronics draw the interest on grain growth in thin layers on a substrate, with semiconductors and metals as well [16,28,41,42]. Recently, grain growth with emerging organic or hybrid compounds has set a new focus on e.g.…”
Section: Fundamentalsmentioning
confidence: 99%
See 1 more Smart Citation
“…The basic concepts were developed with metals, where processing by hot and cold forming in combination with annealing is determinant in tuning their mechanical properties [39,40]. With a transfer of these concepts to classical semiconductors (Si, Ge), the attention focussed on the morphology dependence of the electrical properties [4,6,10,11], where advances of microelectronics draw the interest on grain growth in thin layers on a substrate, with semiconductors and metals as well [16,28,41,42]. Recently, grain growth with emerging organic or hybrid compounds has set a new focus on e.g.…”
Section: Fundamentalsmentioning
confidence: 99%
“…With polycrystalline layers, the size of the crystallites depends on the preparation method and the procedure followed. The morphology of the layers determines all, their mechanical [2,3], their thermal [4,5] and their electrical properties [6,7]. With semiconductors, generation/recombination represents a further issue, determining e.g.…”
Section: Introductionmentioning
confidence: 99%