Good temperature coefficient of frequency SAW resonator on a SiO&lt;inf&gt;2&lt;/inf&gt;/Al/LiNbO&lt;inf&gt;3&lt;/inf&gt; structure

Nakanishi, Hiroyuki; Nakamura, Hiroyuki; Tsurunari, Tetsuya; Fujiwara, Joji; Hamaoka, Yosuke; Hashimoto, Ken-ya

doi:10.1109/ultsym.2010.5935465

Cited by 15 publications

(11 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The outcome of these attempts is shown in Fig. 1, showing the performance boundaries of the best TCSAW [13], [26], [27], TCBAW [25], [28], and Lamb-waves devices [29]- [32] compared to our work (devices A and B) in this article. Note that in Fig.…”

mentioning

confidence: 72%

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Hassanien

Gong

2021

IEEE Trans. Microwave Theory Techn.

View full text Add to dashboard Cite

In this article, near-zero drift and high electromechanical coupling acoustic resonators have been designed and demonstrated. The acoustic resonator is based on Lamb acoustic waves in a bimorph composed of lithium niobate on silicon dioxide. Our approach breaks through a performance boundary in conventional Lamb-wave resonators by introducing the bimorph while operating at higher order resonant modes. This enables the resonator to achieve frequency scalability, a low-temperature coefficient of frequency, and high electromechanical coupling altogether. The electromechanical coupling and temperature coefficient of the resonator were analytically optimized for the A 3 mode through adjusting the thicknesses of different materials in the bimorph. Resonators with different dimensions and stack thickness were fabricated and measured, resulting in a temperature coefficient of frequency ranging from −17.6 to −1.1 ppm/ • C, high electromechanical coupling ranging from 13.4% to 18%, and quality factors up to 800 at 3.5 GHz. The achieved specifications are adequate for fifth-generation (5G) sub-6-GHz frequency bands n77 and n78. Index Terms-Acoustic resonators, fifth generation (5G), lithium niobate on insulator (LNOI), low-temperature coefficient of frequency (TCF), microelectromechanical systems (MEMS), new radio (NR), piezoelectricity. I. INTRODUCTION T HE fifth-generation mobile network (5G) is a global wireless standard advancing the prevalent connectivity between people, machines, and devices [1], [2]. The third-generation partnership project (3GPP), a collective project partnership of mobile system manufacturers, has played a critical role in the development and deployment of the 5G standard [1]. Specifically, 5G new radio (NR) uses modulation schemes, waveforms, and access technologies, enabling increased data rates, coverage, reliability, capacity, and low latency [2]. 5G is driven by consumers and industrial trends, such as enhanced mobile broadband (eMBB), Internet of Things (IoT), smart vehicles, and healthcare/critical Manuscript

show abstract

mentioning

confidence: 72%

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Hassanien

Gong

2021

IEEE Trans. Microwave Theory Techn.

View full text Add to dashboard Cite

show abstract

“…TC-SAW ladder filters are widely used in wireless communication systems because of good temperature stability [25]. In this case, we consider one-port ladder resonators as building blocks of ladder filters.…”

Section: Calculation Of Tc-saw Ladder Filtersmentioning

confidence: 99%

Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction

Chen

Zhang

et al. 2020

Micromachines

View full text Add to dashboard Cite

In this paper, a hybrid full-wave analysis of surface acoustic wave (SAW) devices is proposed to achieve accurate and fast simulation. The partial differential equation (PDE) models of the physical system in question and graphics processing unit (GPU)-assisted hierarchical cascading technology (HCT) are used to calculate acoustic-electric characteristics of a SAW filter. The practical solid model of the radio frequency (RF) filter package is constructed in High Frequency Structure Simulator (HFSS) software and the parasitic electromagnetics of the entire package is considered in the design process. The PDE-based models of the two-dimensional finite element method (2D-FEM) are derived in detail and solved by the PDE module embedded in COMSOL Multiphysics. Due to the advantages of PDE-based 2D-FEM, it is universal, efficient and not restricted to handling arbitrary materials and crystal cuts, electrode shapes, and multi-layered substrate. Combining COMSOL Multiphysics with a user-friendly interface, a flexible way of modeling and mesh generation, it can greatly reduce the complicated process of modeling and physical properties definition. Based on a hybrid full-wave analysis, we present an example application of this approach on a TC-SAW ladder filter with 5° YX-cut LiNbO3 substrate. Numerical results and measurements were calculated for comparison, and the accuracy and efficiency of the proposed method were verified.

show abstract

“…[8][9][10][11][12] In SAW devices, one of the most important design challenges is the suppression of transverse mode resonances. Various suppression techniques [13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28] have been proposed such as selective removal of SiO 2 , [17][18][19][20][21][22] bending resonator structure, 23) and piston mode design. [24][25][26][27][28] For the piston mode operation, phase shifters such as hammer head and metal dots are placed on electrodes near the aperture edges of interdigital transducer (IDT).…”

Section: Introductionmentioning

confidence: 99%

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO₂/LiNbO₃ structure

Gong

Wong

et al. 2022

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

This paper discusses influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated (TC) surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the conventional Cu stripes are chosen, and their displacement are considered from IDT aperture edges. It is shown that achievable transverse mode suppression is almost identical when the stripe shape is adjusted for each case. Next, Cu dots are considered as patterned phase shifters. It is shown comparable transverse mode suppression is possible also for this case. However, relatively strong SAW lateral leakage occurs when they are placed above IDT fingers. These results indicate that location and pattern can be added as design parameters for the phase shifters on SiO2. It is favorable for further enhancement of total device performances.

show abstract

Good temperature coefficient of frequency SAW resonator on a SiO<inf>2</inf>/Al/LiNbO<inf>3</inf> structure

Cited by 15 publications

References 6 publications

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO₂/LiNbO₃ structure

Contact Info

Product

Resources

About

Good temperature coefficient of frequency SAW resonator on a SiO<inf>2</inf>/Al/LiNbO<inf>3</inf> structure

Cited by 15 publications

References 6 publications

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure

Contact Info

Product

Resources

About

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO₂/LiNbO₃ structure