Hybrid Full-Wave Analysis of Surface Acoustic Wave Devices for Accuracy and Fast Performance Prediction

Self Cite

SAW devices with a multi-layered piezoelectric substrate have excellent performance due to advantages such as a high quality factor, Q, low loss insertion, large bandwidth, etc. Prior to manufacturing, a comprehensive analysis and proper design are essential to evaluating the device’s key performance indicators, including the Bode Q value, bandwidth, and transverse mode suppression. This study explored the performance of SAW resonators employing a 42°Y-X LiTaO3 (LT) thin-plate-based multi-layered piezoelectric substrate. The thicknesses for each layer of the 42°Y-X LT/SiO2/poly-Si/Si substrate were optimized according to the index of phase velocity, Bode Q value, and bandwidth. The effect of the device structure parameters on the dispersion curve and slowness curve was studied, and a flat slowness curve was found to be favorable for transverse mode suppression. In addition, the design of the dummy configuration was also optimized for the suppression of spurious waves. Based on the optimized design, a one-port resonator on the 42°Y-X LT/SiO2/poly-Si/Si substrate was fabricated. The simulation results and measurements are presented and compared, which provides guidelines for the design of new types of SAW devices configured with complex structures.

Section: Simulation Techniquesmentioning

confidence: 99%

Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression

Pan,

Yang,

et al. 2023

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“…Moreover, COMSOL software can transform the PDE-based FEM model to the COMSOL code, which is flexible and feasible for users to modeling, mesh generation and properties definition. In our previous work, recently presented in Micromachines [41], a PDE-based 2D-FEM model is proposed and validated for SAW devices simulation. Considering its generality, this work extends the model to the periodic analysis of SAW resonator, and we investigate two significant contributions to achieving the dimensionally reduced PDE model with the help of COMSOL code.…”

Section: Comsol Multiphysics and Computation Proceduresmentioning

confidence: 99%

“…In our previous work [41], the constitutive equations of the piezoelectric film are derived detailly which can describe the behavior of SAW devices with arbitrary materials and structure. For convenience, we only restate the main derivation of the PDE-based model in piezoelectric devices [45].…”

Section: Pde-based 2d-fem Modelmentioning

confidence: 99%

“…To simplify and ensure accuracy, a continuous boundary condition is applied to the two interfaces of the 3D-block in the aperture direction to describe the infinite length of the aperture. In our previous work [41], the authors also proposed a similar partial differential equation (PDE)-based 2D-FEM model, which is theoretically equivalent to the built-in quasi-3D FEM model reported previously. Since the computation domain of the PDE-based 2D-FEM model is a 2D plane while that of the quasi-3D FEM model reported previously is a 3D block, the proposed PDE-based 2D-FEM model radically reduces the number of DOFs, and thus advantages in calculation speed.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code

Zhang

Chen

et al. 2021

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Radio-frequency (RF) surface acoustic wave (SAW) resonators used as filters and duplexers are mass-produced and widely used in current mobile phones. With the numerous emergences of the diverse device structure, a universal method used for the accurate and fast simulation of the SAW resonator calls for urgent demand. However, there are too many instances where the behavior of the entire acoustic resonator cannot be characterized rapidly and efficiently due to limitations in the current computer memory and speed. This is especially true for SAW resonators configured with long arrays of inter-digital transducers (IDTs), and we have to resort to a periodic analysis. In this paper, the previously reported generalized partial differential equations (PDE) based on the two-dimensional finite element method (2D-FEM) model is extended to analysis for the periodic structure of the SAW resonator. We present model order reduction (MOR) techniques based on FEM and periodic boundary conditions to achieve a dimensionally reduced PDE model without decreasing the accuracy of computations. Examples of different SAW devices, including the regular SAW, IHP-SAW and TC-SAW resonators, are provided which shows the results of the periodic analysis compared with the experimental results of the actual resonators. The investigation results demonstrate the properties of the proposed methodology and prove its effectiveness and accuracy.

“…We built the model as shown in Figure 6, and the performance of the delay line based on SPUDTs could be predicted accurately and fast by the FEW following the steps in [27]. The delay line structure was constructed on the surface of the 128 • YX LiNbO 3 substrate with aluminum as the electrodes.…”

Section: Optimization and Analysis Of Idtsmentioning

confidence: 99%

Design and Optimization of a Novel SAW Gyroscope Structure Based on Amplitude Modulation with 1-D Phononic Crystals

Zhao

Zhang

2021

Surface acoustic wave gyroscopes (SAWGs), as a kind of all-solid-state micro-electro-mechanical system (MEMS) gyroscopes, can work normally under extremely high-impact environmental conditions. Among the current SAWGs, amplitude-modulated gyroscopes (AMGs) are all based on the same gyro effect, which was proved weak, and their sensitivity and intensity of the output are both lower than frequency-modulated gyroscopes (FMGs). However, because FMGs need to process a series of frequency signals, their signal processing and circuits are far less straightforward and simple than AMGs. In order to own both high-sensitivity and simple signal processing, a novel surface acoustic traveling wave gyroscope based on amplitude modulation is proposed, using one-dimensional phononic crystals (PCs) in this paper. In view of its specific structure, the proposed gyroscope consists of a surface acoustic wave oscillator and a surface acoustic wave delay line within a one-dimensional phononic crystal with a high-Q defect mode. In this paper, the working principle is analyzed theoretically through the partial wave method (PWM), and the gyroscopes with different numbers of PCs are also designed and studied by using the finite element method (FEM) and multiphysics simulation. The research results demonstrate that under a 1 V oscillator voltage output, the higher sensitivity of −23.1 mV·(rad/s)−1 in the linear range from −8 rad/s to 8 rad/s is reached when the gyro with three PC walls, and the wider linear range from −15 rad/s to 17.5 rad/s with the sensitivity of −6.7 mV·(rad/s)−1 with only one PC wall. Compared with the existing AMGs using metal dots to enhance the gyro effect, the sensitivity of the proposed gyro is increased by 15 to 112 times, and the linear range is increased by 4.6 to 186 times, even without the enhancement of the metal dots.