Global (volume-averaged) model of inductively coupled chlorine plasma: Influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

Abstract

General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. AbstractAn inductively coupled radio-frequency plasma in chlorine is investigated via a global (volume-averaged) model, both in continuous and square wave modulated power input modes. After the power is switched off (in a pulsed mode) an ion-ion plasma appears. In order to model this phenomenon, a novel quasi-neutrality implementation is proposed. Several distinct Cl wall recombination probability measurements exist in the literature, and their effect on the simulation data is compared. We also investigated the effect of the gas temperature that was imposed over the range 300-1500 K, not calculated self-consistently. Comparison with published experimental data from several sources for both continuous and pulsed modes shows good agreement with the simulation results.

Low to intermediate energy elastic electron scattering from dichloromethane (CH2Cl2)

“…Electron scattering from chlorine containing compounds has many important applications. It is significant in etching processes as source of chlorine atoms [1][2][3] and is also frequently used in organic chemistry as both reactants and solvents. As results of these applications, there is an expected increase in the concentration of chlorine containing molecules in the atmosphere, which has environmental consequences.…”

“…Compared to more established technologies such as catalytic oxidation, thermal decomposition, etc, NPP is better-suited to remove chlorinated compounds especially those which are species particularly difficult to decompose [7,8]. It is expected that the electron-collision cross sections of chlorine substituted methanes would be important to shed light on the underlying physics of such processes since they are necessary for the determination of the reactional rates [2,3,9]. In view of the needs of such collision data, a joint collaboration has been setup between electron collision groups located at Universidade Federal de São Carlos (UFSCar) and California State University Fullerton (CSUF) to obtain experimental and theoretical differential cross sections (DCS) on electron scattering for chlorinated hydrocarbons over wide incident electron energy (E) range.…”

Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation

“…It is also known that surface interaction probabilities for reactive neutral species can strongly influence the properties and charged particle dynamics of low pressure plasma sources [38,[57][58][59][60][61][62]. A prominent example is the role played by the surface quenching probability of the molecular oxygen metastable molecule O 2 (a g 1 D ) in determining the electronegativity (i.e.…”

A global model of cylindrical and coaxial surface-wave discharges

“…, where R j e is an electronic reaction rate and E j is the reaction energy calculated from the internal energies of the particles [52]. The elastic loss is Q Ela = i n e n i 3T e me mi k El ei , where k El ei is the elastic rate coefficient calculated from the corresponding cross-section.…”