An impedance-matched voltage sensitivity (β v,opt ) of 20 400 V/W at 94 GHz was achieved at zero bias and room temperature using heterojunction backward diodes that were based on a p + -GaAsSb/i-InAlAs/n-InGaAs that was lattice matched to an InP substrate. Doping concentrations in the diodes were adjusted to optimize the sensitivity and its nonlinear characteristic. The proper donor doping concentration in n-InGaAs to increase its sensitivity was determined to be 1×10 18 cm −3 . Meanwhile, the proper acceptor doping concentration in a p-GaAsSb layer was 5 × 10 18 cm −3 to achieve a large nonlinearity as a curvature coefficient (γ ) of −49.4 V −1 , which exceeded that of ideal Schottky diode. The dependence of doping concentration on noise performance was also considered. The lattice-matched GaAsSb-based backward diodes are applicable in millimeter wave detectors and mixers.Index Terms-Backward diode, GaAsSb, interband tunneling, lattice match, millimeter wave, nonlinearity, sensitivity, zero bias.