Fundamentals of convection in melt growth

Preliminary design of a novel high throughput CVD reactor for photovoltaic applications

“…This hierarchical procedure was already adopted for the analysis of different types of CVD reactors (barrel & horizontal ones) thus it will be not addressed here in detail, being the model equations described in . In summary, the procedure conceptually here adopted to analyze the problem was the following : –To roughly design the reactor through analytical models assuming the process is in mass transport limited conditions. –To derive a lumped kinetic expression able to substantially represent the detailed chemistry in the temperature and pressure ranges of interest by means of a very fast running simplified 1D model, like the one adopted several times by our research group an described in detail in reference . –To verify the lumped kinetics previously derived through a 2D model of the reactor. In that case the calculations are also repeated through the detailed mechanism to compare the accuracy of the calculations. –To embed the now verified lumped kinetics into the detailed 3D model to perform the reactor optimization and design. –To perform sensitivity analysis to identify the construction features affecting in the largest extent the reactor performance.…”