Free-standing porous silicon single and multiple optical cavities

Abstract

The porous silicon free-standing microcavity structures, with different layer designs, were fabricated. The single microcavities were found to show transmission resonances in the wavelength region of 1.55μm with quality factors of upto 3380. The incident angle dependent measurements were also reported where transmission peak blueshift and splitting of transverse electric and transverse magnetic polarized modes due to porous silicon birefringence were observed

Porous silicon-based rugate filters

“…This permits the fabrication of any refractive-index profile, so onedimensional photonic structures can be grown easily, with no need for expensive equipment. Bragg reflectors, 4 microcavities, 3,5 waveguides, 6 and more-complex structures 7,8 made of PS have been experimentally reported. These structures can serve many applications, such as optical filters, 9 resonating media for altering emission properties of luminescent substances inside the pores, 10,11 and vapor sensors.…”

Dry transfer bonding of porous silicon membranes to OSTE(+) polymer microfluidic devices

“…4. First, the porous silicon layer is formed by electrochemical etching and a final current pulse is applied to partially release the membrane from the silicon substrate [9] (Fig. 4 a).…”

Nematic Liquid Crystal Confined in Electrochemically Etched Porous Silicon: Optical Characterization and Applications in Photonics

“…That current density corresponds to the electropolishing mode and results in the PSi film detachment from the substrate. Free-standing films are thin and extremely fragile (Ghulinyan et al, 2003), however, this disadvantage is eliminated as soon as the film is placed inside a solid glass cell. But then the free-standing PSi film has some advantages as compared with the one on a wafer.…”