Free-standing macroporous silicon membranes over a large cavity for filtering and lab-on-chip applications

Pagonis, D. N.; Nassiopoulou, A. G.

doi:10.1016/j.mee.2006.01.065

Cited by 21 publications

(9 citation statements)

References 19 publications

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“…82 Considering the formation of pSi layer with a certain thickness, this layer is released by sharply increasing current density to silicon electropolishing mode (B500 mA cm À2 for p-type silicon). [190][191][192][193][194][195][196][197] A major disadvantage of the method is that the layer is easily broken into small pieces after detaching from substrates. A refined method for the detachment is examined by reducing the HF concentration at the end of the anodic process.…”

Section: Free-standing and Flow-throughmentioning

confidence: 99%

Electrochemical engineering of hollow nanoarchitectures: pulse/step anodization (Si, Al, Ti) and their applications

et al. 2014

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Hollow nanoarchitectured materials with straight channels play a crucial role in the fields of renewable energy, environment and biotechnology due to their one-dimensional morphology and extraordinary properties. The current challenge is the difficulty on tailoring hollow nanoarchitectures with well-controlled morphology at a relatively low cost. As a conventional technique, electrochemistry exhibits its unique advantage on machining nanostructures. In this review, we present the progress of electrochemistry as a valuable tool in construction of novel hollow nanoarchitectures through pulse/step anodization, such as surface pre-texturing, modulated, branched and multilayered pore architectures, and free-standing membranes. Basic principles for electrochemical engineering of mono- or multi-ordered nanostructures as well as free-standing membranes are extracted from specific examples (i.e. porous silicon, aluminum and titanium oxide). The potential of such nanoarchitectures are further demonstrated for the applications of photovoltaics, water splitting, organic degradation, nanostructure templates, biosensors and drug release. The electrochemical techniques provide a powerful approach to produce nanostructures with morphological complexity, which could have far-reaching implications in the design of future nanoscale systems.

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Section: Free-standing and Flow-throughmentioning

confidence: 99%

Electrochemical engineering of hollow nanoarchitectures: pulse/step anodization (Si, Al, Ti) and their applications

et al. 2014

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“…It was observed that the current density has less effect on the pore diameter. From previous studies, the pore size diameter was affected more by the HF concentration [14] and doping level [22,23].…”

Section: Resultsmentioning

confidence: 99%

Effect of current density on silicon surface in electrochemical etching

Burham

Hamzah

Majlis

2014

Micro & Nano Letters

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A simple and reliable fabrication technique for producing nanoporous filters is presented. The nanoporous filter plays an important role in biomedical microelectromechanical systems applications, especially in filtering out waste and solute from inside human blood. Nanosized components in the biological fluid are filtered using silicon membranes that are controlled by nanosized pores. The technique explored was the electrochemical etching (ECE) process of silicon. This approach starts with thinning the bulk silicon until only several micrometres thick using the KOH process and then carry out ECE to produce pores. The yield of the process was a 3 µm thick nanoporous silicon membrane with pore sizes of less than 100 nm. This physical characteristic enables the membrane to filter all the waste and solute particles of less than 100 nm. Owing to this simple and reliable method, the development of nanoporous silicon membrane can be used in nanofiltration applications especially in an artificial kidney.

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“…This can be done with a sufficiently diluted etchant or with plasma. Alternatively, one can oxidize the PS and then remove the oxide by an HF dip [50,54]. This method can be also applied to MPS structures by a double-layer technique: first etching the macroporous volume and afterwards evolving the micro-PS beneath the macropores [54].…”

Section: In Situmentioning

confidence: 99%

“…However, it is in microfluidics and lab-on-chip applications that MPS is most interesting. Pore diameter can be modulated and adjusted for filtering applications [46,54], such that using the appropriate pore size one can selectively allow the passage of particles or biological species. Furthermore, the device can easily be protected against harsh environments by oxidation or other surface treatment.…”

Section: Other Mems Devicesmentioning

confidence: 99%

Macroporous Silicon: Technology and Applications

Bru¹,

Rodriguez²

2017

New Research on Silicon - Structure, Properties, Technology

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Macroporous silicon (MPS) is a versatile material that since its origin in the early 1990s has seen intense research and has found applications in many fields. MPS is a key technology in photonic crystals research, and optic and photonic applications are its main applications. However, this chapter is devoted to several of the non-photonic uses of MPS. In particular, new electronic and MEMS devices and applications will be described. Furthermore, in this chapter, the technology of MPS fabrication will be presented.

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Free-standing macroporous silicon membranes over a large cavity for filtering and lab-on-chip applications

Cited by 21 publications

References 19 publications

Electrochemical engineering of hollow nanoarchitectures: pulse/step anodization (Si, Al, Ti) and their applications

Electrochemical engineering of hollow nanoarchitectures: pulse/step anodization (Si, Al, Ti) and their applications

Effect of current density on silicon surface in electrochemical etching

Macroporous Silicon: Technology and Applications

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