Fracture testing of bulk silicon microcantilever beams subjected to a side load

Wilson, Christopher J.; Beck, Patricia

doi:10.1109/84.536620

Cited by 126 publications

(72 citation statements)

References 6 publications

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“…In distance less than few micrometers, Casimir force significantly affects the nano-beams stability. Casimir force between two plates can be explained via electromagnetic quantum vacuum fluctuations and motion of virtual photons between two conductive surfaces (Lifshitz, 1956) .In recent years, various approaches such as experimental measurements (Buks et al, 2001a;2001b), using finite element methods (Moghimi Zand et al, 2010;Tadi Beni et al, 2013), experimental observations (Wilson and Beck, 1996;Sundararajan and Bhushan, 2002), applying classic continuum theory (Ramezani et al, 2008;2007;Farrokhabadi et al, 2013;, semi-analytical approaches Koochi and Abadyan 2011;Duan et al, 2013) are utilized to investigate the effect of Casimir force on performance of nano-systems. Another dispersion force that is dominant in nano-scales is the vdW force that affects the stability of nano-structures.…”

Section: Introductionmentioning

confidence: 99%

Modeling the size dependent pull-in instability of beam-type NEMS using strain gradient theory

Koochi

Sedighi

Abadyan

2014

Lat. Am. j. solids struct.

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It is well recognized that size dependency of materials characteristics, i.e. size-effect, often plays a significant role in the performance of nano-structures. Herein, strain gradient continuum theory is employed to investigate the size dependent pull-in instability of beam-type nano-electromechanical systems (NEMS). Two most common types of NEMS i.e. nano-bridge and nano-cantilever are considered. Effects of electrostatic field and dispersion forces i.e. Casimir and van der Waals (vdW) attractions have been considered in the nonlinear governing equations of the systems. Two different solution methods including numerical and Rayleigh-Ritz have been employed to solve the constitutive differential equations of the system. Effect of dispersion forces, the size dependency and the importance of coupling between them on the instability performance are discussed.

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Section: Introductionmentioning

confidence: 99%

Modeling the size dependent pull-in instability of beam-type NEMS using strain gradient theory

Koochi

Sedighi

Abadyan

2014

Lat. Am. j. solids struct.

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“…The FEA uses eight-noded quadrilaterial elements providing a 2D plane stress analysis. The material properties, [11][12][13] including the Young's modulus ͑E͒, Poisson's ratio ͑v͒, and thermal expansion coefficient ͑␣͒, of the solid Si͑100͒, Ge͑100͒, and SiO 2 used in our FEA are listed in Table I.…”

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confidence: 99%

Mechanical stability of ultrathin Ge∕Si film on SiO2: The effect of Si∕SiO2 interface

Huang

Nairn

Liu

et al. 2005

Journal of Applied Physics

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We perform two-dimensional linear elastic finite element analysis to investigate the mechanical stability of ultrathin Ge/ Si film grown on or bonded to SiO 2 , using imperfect interface elements between Si and SiO 2 to model Si/ SiO 2 interfacial slippage. We demonstrate that the overall composite film is stable when only the tangential slippage is allowed, however, it becomes unstable when normal slippage is allowed: the coherently strained Ge island induces a large local bending of Si layer, and separates the Si layer from the underlying SiO 2 forming a void at the Si/ SiO 2 interface.

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“…All the beams tested showed linear elastic behaviour followed by abrupt failure, which is suggestive of brittle fracture. Previously reported numbers of strengths range from 1 to 6 GPa for silicon (Johansson et al 1988;Ericson & Schweitz 1990;Wilson & Beck 1996;Sharpe et al 1997;Sato et al 1998;Tsuchiya et al 1998;Greek et al 1999;Mazza & Dual 1999;Yi et al 2000) and approximately 1 GPa for SiO 2 (Tsuchiya et al 2000) microscale specimens. This clearly indicates that bending strength shows a specimen size dependence.…”

Section: Bending Tests Of Nanostructures Using An Afmmentioning

confidence: 99%

“…In the following, we begin with the stress distribution in smooth nanobeams followed by the effect of surface (110), Bhushan & Venkatesan (1993). b Johansson et al (1988), Ericson & Schweitz (1990), Wilson & Beck (1996), , Sharpe et al (1997), Sato et al (1998), Tsuchiya et al (1998), Greek et al (1999) and Yi et al (2000). c Johansson et al (1989), Ballarini et al (1997), Kahn et al (1999) and Fitzgerald et al (2000).…”

Section: Finite-element Analysis Of Nanostructures With Roughness Andmentioning

confidence: 99%

Nanotribology and nanomechanics in nano/biotechnology

Bhushan

2008

Phil. Trans. R. Soc. A.

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Owing to larger surface area in micro/nanoelectromechanical systems (MEMS/NEMS), surface forces such as adhesion, friction, and meniscus and viscous drag forces become large when compared with inertial and electromagnetic forces. There is a need to develop lubricants and identify lubrication methods that are suitable for MEMS/NEMS. For BioMEMS/BioNEMS, adhesion between biological molecular layers and the substrate, and friction and wear of biological layers may be important, and methods to enhance adhesion between biomolecules and the device surface need to be developed. There is a need for development of a fundamental understanding of adhesion, friction/stiction, wear, the role of surface contamination and environment, and lubrication. MEMS/NEMS materials need to exhibit good mechanical and tribological properties on the micro/nanoscale. Most mechanical properties are known to be scale dependent. Therefore, the properties of nanoscale structures need to be measured. Componentlevel studies are required to provide a better understanding of the tribological phenomena occurring in MEMS/NEMS. The emergence of micro/nanotribology and atomic force microscopy-based techniques has provided researchers with a viable approach to address these problems. This paper presents an overview of micro/nanoscale adhesion, friction, and wear studies of materials and lubrication studies for MEMS/NEMS and BioMEMS/BioNEMS. It also presents a review of scale-dependent mechanical properties, and stress and deformation analysis of nanostructures.

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Fracture testing of bulk silicon microcantilever beams subjected to a side load

Cited by 126 publications

References 6 publications

Modeling the size dependent pull-in instability of beam-type NEMS using strain gradient theory

Modeling the size dependent pull-in instability of beam-type NEMS using strain gradient theory

Mechanical stability of ultrathin Ge∕Si film on SiO2: The effect of Si∕SiO2 interface

Nanotribology and nanomechanics in nano/biotechnology

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