2005
DOI: 10.1063/1.1926421
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Mechanical stability of ultrathin Ge∕Si film on SiO2: The effect of Si∕SiO2 interface

Abstract: We perform two-dimensional linear elastic finite element analysis to investigate the mechanical stability of ultrathin Ge/ Si film grown on or bonded to SiO 2 , using imperfect interface elements between Si and SiO 2 to model Si/ SiO 2 interfacial slippage. We demonstrate that the overall composite film is stable when only the tangential slippage is allowed, however, it becomes unstable when normal slippage is allowed: the coherently strained Ge island induces a large local bending of Si layer, and separates t… Show more

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“…The analytical results are further confirmed by finite element analysis ͑FEA͒ calculations 18,19 as shown in Fig. 2.…”
Section: ͑4͒supporting
confidence: 54%
“…The analytical results are further confirmed by finite element analysis ͑FEA͒ calculations 18,19 as shown in Fig. 2.…”
Section: ͑4͒supporting
confidence: 54%