FR4-based electromagnetic scanning micro-grating integrated with an angle sensor for a low-cost NIR micro-spectrometer

Wen, Quan; Lei, Hongjie; Huang, Jian; Yu, Fan; Huang, Liangkun; Zhang, Jing; Li, Dongling; Peng, Yingchun; Zhang, Wen

doi:10.1364/ao.58.004642

Cited by 14 publications

(9 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Figure 9(b) shows an example of an asymmetrical crossed Czerny-Turner system, which could broaden the spectral range of the resulted device. [72,81] The crossing of light was beneficial to reduce the volume of the instrument, while the coma aberration was eliminated at specified wavelength by designing the focusing mirror and the collimation mirror with different focal lengths.…”

Section: Applications Of Mems Scanning Gratingsmentioning

confidence: 99%

MEMS gratings and their applications

Zhou

Lim

et al. 2021

International Journal of Optomechatronics

View full text Add to dashboard Cite

Grating plays an essential role in various optical systems owing to its unique dispersion properties. In recent years, there is increasing demand to miniaturize optical systems for a wide range of field applications. Therefore, the integration of diffraction grating with MEMS technology provides an efficient way to build truly miniaturized optical systems. Till now, MEMS diffraction gratings have mainly been explored in two directions, namely MEMS scanning gratings and MEMS tunable gratings. MEMS scanning gratings are constructed with a variety of MEMS actuators to drive a grating platform to scan across the target, and they play a significant role in various scanning systems. Meanwhile, the dispersive properties of grating scanners make them attractive in wavelength sensing applications, including spectrometers and hyperspectral imaging systems. Tunable gratings typically employ MEMS actuators to dynamically change the diffraction properties, thus tuning its wavelength sensitivity for a specific application. Thus, this review will introduce these two types of MEMS gratings in detail and evaluate their efficiency and advantages in various fields.

show abstract

Section: Applications Of Mems Scanning Gratingsmentioning

confidence: 99%

MEMS gratings and their applications

Zhou

Lim

et al. 2021

International Journal of Optomechatronics

View full text Add to dashboard Cite

show abstract

“…According to Equation (2), the magnetic field intensity is not uniformly distributed in the micromirror area. It is known that the driving coil is designed in involute mode [16], and the length of each straight line increases from inside to outside. Therefore, under the action of different magnetic field intensity, the force generated by each straight driving coil is also different [17,18].…”

Section: Simulation Analysis and Designmentioning

confidence: 99%

Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror

Chen

2021

Micromachines

View full text Add to dashboard Cite

In this paper, the effect of driving system on working performance of electromagnetic integrated scanning micromirror (ISM) is studied. To further improve the optimization design of the electromagnetic ISM, the detailed theoretical analysis, simulation analysis, and experimental test are carried out, respectively. By changing the force form and external magnetic field of the device, the mechanical scanning angle, driving voltage, and resonant frequency of the electromagnetic ISM will be changed accordingly, and then the change of the working performance of the ISM is explored. Through the optimization analysis and comparative test, the optimal design scheme of driving system is obtained, and the effect of driving system on the working performance of the electromagnetic ISM is verified. The experimental results show that by optimizing the structure of the driving system, the mechanical scanning angle of the electromagnetic ISM is increased by about 20%, and the driving voltage is decreased about 10% observably, and the working performance of the electromagnetic ISM is significantly improved. The research results have important significance and practical application value for the extended application of the electromagnetic ISM in the field of optical detection.

show abstract

“…The compound control system is based on the FR4-based electromagnetic scanning micrograting we previously developed [15]. The photograph of the scanning micrograting is shown in Figure 1a.…”

Section: Overview Of the Fr4-based Electromagnetic Scanning Microgratingmentioning

confidence: 99%

“…In recent years, most of the scanning micrograting has been developed and fabricated using MEMS technology. The actuation mechanisms can be mainly divided into four categories: electrostatic [9], electrothermal [10,11], electromagnetic [12][13][14][15], and piezoelectric [16]. The electromagnetic actuation mechanism is widely used for its large driving torque, linear mechanical properties, and low driving voltage.…”

Section: Introductionmentioning

confidence: 99%

“…Electromagnetic coils are more suitable for integration into the flame-retardant 4 (FR4)-based electromagnetic scanning micrograting, due to its excellent process compatibility with printed circuit boards (PCBs). Because of the shortcomings of the silicon MEMS scanning micrograting, such as high manufacturing cost, fragility, and poor shock and vibration [17], we developed the FR4-based electromagnetic scanning micrograting [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting

Wen

Lei

et al. 2019

Electronics

Self Cite

View full text Add to dashboard Cite

This paper presents a compound control system for precise control of the flame-retardant 4 (FR4)-based electromagnetic scanning micrograting. It mainly consists of a frequency controller and an angle controller. A dual closed-loop structure consisting of a current loop and an angle loop was designed in the angle controller. In addition, the incremental proportional–integral–derivative (PID) control algorithm was designed in the current loop, and the fuzzy-PID control algorithm was employed in the angle loop. From the experimental results, the frequency controller can effectively track the real-time resonant frequency of the scanning micrograting with a tracking accuracy of 0.1 Hz. The overshoot of the scanning micrograting is eliminated. Compared to an open-loop control system, the control system presented in this work reduces the steady-state error of the scanning micrograting from 1.122% to 0.243%. The control accuracy of the compound control system is 0.02°. The anti-interference recovery time of the scanning micrograting was reduced from 550 ms to 181 ms, and the long-term stability was increased from 2.94% to 0.12%. In the compound control system presented in this paper, the crucial parameters of the FR4-based electromagnetic scanning micrograting, including motion accuracy, anti-interference ability, and long-term stability, were effectively improved.

show abstract

FR4-based electromagnetic scanning micro-grating integrated with an angle sensor for a low-cost NIR micro-spectrometer

Cited by 14 publications

References 20 publications

MEMS gratings and their applications

MEMS gratings and their applications

Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror

A Compound Control System for FR4-Based Electromagnetic Scanning Micrograting

Contact Info

Product

Resources

About