Formation of β-FeSi2 thin films using laser ablation

Long afterglow characteristics of thin film phosphor fabricated by laser ablation

“…Details of a thin film fabrication process by the laser ablation have been described elsewhere [5][6][7]. The powder with a nominal composition of Sr 0.9 Al 2 O 4 :Eu 0.05 ,Dy 0.05 is pressed to a pellet and is used for an ablation bulk target.…”

Growth of β-FeSi2 Thin Films on Silicon Substrates by Pulsed Laser Deposition Using ε-FeSi Alloy Targets

“…In order to produce -FeSi 2 for light-emitting devices, 1,2) such as lightemitting diodes and laser diodes, researchers have attempted to grow -FeSi 2 thin films on silicon substrates by a variety of methods, including solid phase epitaxy, 3) molecular beam epitaxy, 4) ion beam synthesis 5) and pulsed laser deposition (PLD). [6][7][8][9][10] Pulsed laser deposition is a promising deposition method since it can be performed using a relatively simple system and the deposition conditions can be easily changed to control film growth. This means that PLD has the potential to produce high-quality -FeSi 2 thin films.…”

“…This means that PLD has the potential to produce high-quality -FeSi 2 thin films. In previous PLD studies, randomly oriented polycrystallized films of -FeSi 2 were produced on a Si substrate using various targets including Fe-Si alloy 6,[8][9][10] and Fe. 7) In this study, we employed PLD for growing -FeSi 2 films on Si(100) substrates using an "-FeSi alloy target.…”

Laser ablation plume of FeSi 2 alloy target studied by TOF mass and optical emission spectroscopies

“…On the other hand, pulsed laser deposition (PLD) possibly realizes not only the relatively-low temperature synthesis of crystalline materials due to the generation of energetic species but the precise transfer of target composition to films. In fact, the PLD of 3-FeSi2 films from the target of FeSi2 [10,11] and Fe metal [12] has been performed. Although, in these previous works, it was found that the ablation conditions including laser wavelength and fluence had an influence on the products, little is known about the ablation plume of FeSi2 target; the effects of the fluence or wavelength on the mass, kinetic energies and excited states of species in the plume.…”