Abstract:Time-of-flight (TOF) mass and optical emission spectroscopies have been performed on the ablation plume from a-FeSi2 alloy target under KrF excimer laser irradiation at a fluence of 0.35-2.5 J/cm2 to characterize the mass, kinetic energies and excited states of the ej ected species. According to the TOF mass measurements in vacuum, the most prominent species were Si and Fe atoms and ions over the entire fluence range, in addition to Si dimer. At 0.4-0.7 J/cm2, only neutrals of Si, Fe and Si2 with the kinetic e… Show more
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