2000
DOI: 10.1016/s0040-6090(00)01048-8
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Formation of thin TiNxOy films by using a hollow cathode reactive DC sputtering system

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Cited by 49 publications
(28 citation statements)
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“…Generally, joint replacement components (i.e., TJA systems) are made of Ti-6Al-4V rather than CP-Ti because of its superior mechanical properties. In recent years, metallic oxynitrides have become interesting research materials because of their remarkable optical and electronic properties, mechanical behavior, as well as chemical stability [1][2][3] and good adhesion to polymers, anti-reflective, decorative, and/or diffusion barrier coating for polymer components [4][5][6]. In recent studies [7,8], they revealed properties common to both metallic TiN and semi-conducting TiO 2 compounds.…”
Section: Introductionmentioning
confidence: 99%
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“…Generally, joint replacement components (i.e., TJA systems) are made of Ti-6Al-4V rather than CP-Ti because of its superior mechanical properties. In recent years, metallic oxynitrides have become interesting research materials because of their remarkable optical and electronic properties, mechanical behavior, as well as chemical stability [1][2][3] and good adhesion to polymers, anti-reflective, decorative, and/or diffusion barrier coating for polymer components [4][5][6]. In recent studies [7,8], they revealed properties common to both metallic TiN and semi-conducting TiO 2 compounds.…”
Section: Introductionmentioning
confidence: 99%
“…The wettability studies to determine hydrophilic or hydrophobic nature of titanium oxynitride film are the area that is unexplored and no literature has been found regarding the investigation of this property so far. TiN x O y films are the representative transition metal oxynitrides and can be deposited onto different substrates by various chemical vapor deposition (CVD) and physical vapor deposition (PVD) techniques with a tuneable N y O ratio and consequently, with a wide range of physiochemical properties [17][18][19]. Reactive magnetron sputtering is specially an attractive process to deposit TiON films because of its several intrinsic advantages over CVD and PECVD process [20].…”
Section: Introductionmentioning
confidence: 99%
“…Additionally, titanium oxynitride (TiN x O y ), which can be synthesized as a solid solution between TiN and titanium oxide (TiO), depending on the synthesis conditions, has a potential as high as that of TiN [1][2][3][4]. Recently, nanocrystalline particles of TiN and TiN x O y , which can be used as fillers or additives in order to improve the mechanical or electrical properties of composites, have been also attracted considerable attention [5][6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%
“…Titanium is also found in the form of oxide, the best known as TiO 2 . It is widely used because it is chemically inert and has characteristics such as biocompatibility, good dielectric properties, excellent absorption in the ultraviolet spectrum, high stability and is applied in different industrial areas such as solar cells, environmental purifiers, biomaterials, protective layers against corrosion, nanomaterials [3][4][5][6] . Among the existing titanium oxides compounds, titanium dioxide, TiO 2 , draws attention to possess important properties scientifically and industrially, and can be found in different crystalline structures, the best known being brookite, anatase and rutile.…”
Section: Introductionmentioning
confidence: 99%