RETRACTED ARTICLE: Structural and electrochemical impedance spectroscopic studies on reactive magnetron sputtered titanium oxynitride (TiON) thin films

Abstract

Titanium oxynitride films were deposited onto commercially pure titanium substrates by direct current reactive magnetron sputtering method using Ti targets and an Ar-N 2 -O 2 mixture discharge gas. The X-ray photoelectron spectroscopy survey spectra on the etched surfaces of TiON films exhibited the characteristic Ti 2p, N 1s, and O 1s peaks at the corresponding binding energies 454.5, 397.0, and 530.7 eV, respectively. The surface topography of these coatings was studied using atomic force microscopy. The characteristic Raman peaks at 200 and 641 cm -1 for the TiN bonds and at 148, 398 ,and 518 cm -1 for the TiO 2 bonds were observed from the Laser Raman spectrometer. The potentiodynamic polarization studies in simulated bodily fluid were performed and the results are reported in this article.

Effective nonmetal incorporation in black titania with enhanced solar energy utilization

“…bond. 37 Two XPS peaks of S 2p were observed at around 161.6 and 167.4 eV in the TiO 2 -S as shown in Fig. 2c.…”

Role of precursor chemistry in the direct fluorination to form titanium based conversion anodes for lithium ion batteries

“…24,27-43 A second, higher energy species is located at 455.9 eV which is attributed to Ti 3+/4+ -O/N bonding or satellite peaks for the Ti 3+ -N species. 24,27,28,34,[37][38][39][40][41][42][43][44][45][46][47][48][49][50][51][52] Given the clear evidence of O on the surface (Fig. 4, lower middle), it is likely this species due to the Ti-O/N species.…”

“…The intensity of this peak, and the apparent corresponding concentration, maybe a bit misleading given the overlap between the Ti2p1/2 peak originating from the Ti 3+ -N which overlaps with the Ti2p3/2 peak of Ti 4+ -O. 24,27,28,30,33,34,[37][38][39][40][41][43][44][45][46][47][48][49][51][52][53][54][55][56] The O1s data collected for the TiO x N y precursor shows clear evidence for the presence of two O species. The rst O species has a binding energy of $530 eV and is due to the Ti-O bonds evident in the Ti2p data.…”

Nanocomposite Ti–Si–N Coatings Deposited by Reactive dc Magnetron Sputtering for Biomedical Applications

“…24 The high amount of adventitious carbon, despite the high vacuum during the XPS measurements, suggests that carbon was deposited on the coating surface during the deposition process or sample storage. 25 Furthermore, carbon and oxygen incorporation might have occurred due to the air contamination when the films were transferred from the sputtering instrument to the XPS sample chamber.…”