The sections in this article are
Formalism of Diffusion
Realization of the Diffusion Processes
Atomic Models of Diffusion
Diffusion of Impurities
The Role of Oxidation and Nitridation During Diffusion
The Role of Substrate Orientation in Diffusion
Diffusion in Polycrystalline and Amorphous Silicon
Masking Properties of Oxides
Dopant Diffusion in Silicides
Stress and Diffusion
Characterization of Doped Layers