Formation of electrified images using electron and ion beams

Fudouzi, Hiroshi; Egashira, Mitsuru; Shinya, Norio

doi:10.1016/s0304-3886(97)00133-2

Cited by 9 publications

(14 citation statements)

References 4 publications

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“…The modified surface was changed from hydrophilic to hydrophobic. Electrified patterns were formed on the modified substrates with a 30keV focused ion beam (Ga + -FIB; SMI-8000D, Seiko Instrument Co., Tokyo) equipped with a CAD system [13]. Figure 1 shows schematic procedures for particle deposition on an electrified pattern of the substrate.…”

Section: Methodsmentioning

confidence: 99%

“…This technique is principally based on electrophotography [12]. The main procedure is composed of the following two steps: An electrified pattern is formed on a non-conductive substrate by scanning an electron beam [13]. The substrate with the electrified pattern is then dipped into the suspensions in which the micro-sized particles were dispersed.…”

Section: Introductionmentioning

confidence: 99%

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A New Assembling Method for Nano-sized Particles Using an Electrified Pattern Drawn by a Focused Ion Beam

2000

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This paper describes a new technique to fabricate two-dimensional microstructures assembled with nano-sized particles. The nano-sized particles attract a lot of attention because of their unique properties compared to bulk materials. Micro-and nano-structures assembled with nano-sized particles have potential applications in electronic, optical and biochemical fields. The Self-Assembled Monolayer (SAM) film patterning is one of the methods to assemble the nano-sized particles. We have proposed a new method to assemble nano-sized particles on a substrate using an electric field generated by an electrified pattern. In this study, following our methods titanium oxide (TiO 2 , diam.=21nm) particles were patterned on an n-type (100) silicon substrate having an oxidized layer. The particle deposition on the substrates was carried out using a colloidal suspension process and an aerosol process.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A New Assembling Method for Nano-sized Particles Using an Electrified Pattern Drawn by a Focused Ion Beam

2000

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“…Therefore, we have developed a technique for the formation of an electrified pattern on non-conductive ceramicslls). [lgl,l 20 1. Next, the adhesion process deposits particles on the electrified pattern.…”

Section: Overview Of Manipulating Techniques For Particlesmentioning

confidence: 99%

Arrangement of Microscale Particles by Electrification

Fudouzi¹,

Kobayashi²,

Shinya³

1999

KONA

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“…Ga + -FIB drawing can form a fine charge pattern compared with electron beam drawing. [14] Second, the substrate is immersed in a suspension in which particles are dispersed. In this suspension, the particles are attracted to the charged dots and are selectively deposited on them individually.…”

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confidence: 99%

“…In our previous study, a positively charged pattern shows a dark contrast in the SEM image due to a reduction of secondary electrons from the positively charged pattern. [14] This is called a voltage contrast image using an SEM observation. The dark area shown in Figure 2 corresponds to the positively charged dots on the substrate.…”

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confidence: 99%