A New Assembling Method for Nano-sized Particles Using an Electrified Pattern Drawn by a Focused Ion Beam

Fudouzi, Hiroshi; Kobayashi, Mikihiko; Shinya, Norio

doi:10.1557/proc-636-d9.8.1

Cited by 3 publications

(2 citation statements)

References 15 publications

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“…As a result, several research groups have begun investigating charge based printing. Krinke et al [34] assembled indium particles from the gas phase onto charged areas created by contact charging using a scanning stainless steel needle and a nickel plate; Mesquida et al [27,35] demonstrated the assembly of silica beads and gold colloids from the liquid phase onto charged areas created by contact charging using a scanning probe and Fudouzi et al [29,36] demonstrated the assembly of SiO 2 and TiO 2 particles from both the liquid and gas phases onto charged areas created by focused ion and electron beams. Our parallel nanoxerographic process [26] provides the ability to fabricate numerous charged samples in a reasonable amount of time.…”

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confidence: 99%

Printing nanoparticles from the liquid and gas phases using nanoxerography

et al. 2003

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This paper reports on the directed self-assembly of nanoparticles onto charged surface areas with a resolution of 200 nm from the liquid phase and 100 nm from the gas phase. The charged areas required for this type of nanoxerographic printing were fabricated using a parallel method that employs a flexible, electrically conductive, electrode to charge a thin-film electret. As electrodes, we used metal-coated polymeric stamps and 10 µm thick doped silicon wafers carrying a pattern in topography. Each electrode was brought in contact with a thin-film electret on an n-doped silicon substrate. The charge pattern was transferred into the thin-film electret by applying a voltage pulse between the conductive electrode and the silicon substrate. Areas as large as 1 cm 2 were patterned with charge with 100 nm scale resolution in 10 s. These charge patterns attract nanoparticles. A liquid-phase assembly process where electrostatic forces compete with disordering forces due to ultrasonication has been developed to assemble nanoparticles onto charged based receptors in 10 s from a liquid suspension. A gas-phase assembly process was developed that uses a transparent particle assembly module to direct particles towards the charged surface while monitoring the total charge of assembled particles. Nanoparticles were generated using a tube furnace by evaporation and condensation at the outlet. The electrostatically directed assembly of 10-100 nm sized metal (gold, silver) and 30 nm sized carbon particles was accomplished with a resolution 500-1000 times greater than the resolution of existing xerographic printers.

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Section: Introductionmentioning

confidence: 99%

Printing nanoparticles from the liquid and gas phases using nanoxerography

et al. 2003

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“…14 Since then, several serial chargepatterning processes have been explored to enable the positioning of nanoparticles. 15,[17][18][19] Serial techniques, however, remain slow-the fastest scanning probe-based system needs 1.5 days to pattern an area of 1 cm 2 . 20 As a new direction, we have developed a parallel charge patterning process 16 enabling nanoxerographic printing.…”

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Printing nanoparticle building blocks from the gas phase using nanoxerography

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Lwin

Zheng

et al. 2003

Applied Physics Letters

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This letter reports on the electrostatic driven self-assembly of nanoparticles onto charged surface areas ͑receptors͒ from the gas phase for nanoparticle based device fabrication. The charged areas were generated by a parallel technique that uses a flexible, conductive electrode to pattern electrons and holes in a thin film electret. Samples, 1 cm 2 in size, were patterned with charge in 10 s with 100 nm scale resolution. Charge based receptors, 100 nmϫ100 nm in size, contained ϳ100 elementary charges. A transparent particle assembly module was designed to direct and monitor the assembly of metallic nanoparticles at a resolution of 100 nm, which is ϳ3 orders of magnitude greater than the resolution of existing xerographic printers.

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