An R&D project of large scale ion beam equipment and processing is being carried out from 1986 till 1994. The project includes R&D of five ion beam systems and three material processes for surface modification. The five equipment R&D projects are:(1)High current metal ion beam system, (2)Integrated high current ion beam system, (3)Ionized multiple beam system with high deposition rate, (4)High energy ion beam system, (5)Gas-phase focused ion beam system. The three materials processing R&D projects are:(1)Glass surface modification, (2)Metal surface modification, (3)Low scattering multilayer film deposition. This paper reviews recent progress on development of the project.