Focused ion beam (FIB) milling of electrically insulating specimens using simultaneous primary electron and ion beam irradiation

Stokes, D. J.; Vystavel, T.; Morrissey, F

doi:10.1088/0022-3727/40/3/028

Cited by 33 publications

(32 citation statements)

References 8 publications

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“…For the electrical insulators charging compensation by electron beam during FIBID dramatically enhances the pattern defi nition [ 31 ]. FIBID-C has been tested on glass samples, as shown later in Sect.…”

Section: Patterning: Properties and Limitationsmentioning

confidence: 99%

Metal-Induced Crystallization of Focused Ion Beam-Induced Deposition for Functional Patterned Ultrathin Nanocarbon

Rius

Borrisé

Mestres

2013

Lecture Notes in Nanoscale Science and Technology

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This chapter recapitulates our work based on focused ion beam-induced deposition of ultrathin amorphous carbon (FIBID-C) patterns as a route towards the easy integration of carbon nanomaterials. The use of postdeposition thermal processing causes structural changes, chemical modifi cation, and tuning of functional properties of the as-deposited FIBID-C. Particularly, in combination with metals our approach allows obtaining site-specifi c graphene-like features on insulators. We explore how to convert FIBID-C into functional materials, namely, graphene-like layers or diamond-like coatings, or combination with various metals.First, we provide a general description of FIBID technique to frame the profuse detailed case of carbon deposition of ultrathin carbon micropatterns. Then, the study of the transformation of FIBID-C by thermal processing reveals the unique characteristics of the as-deposited materials and particularities of the metal-induced crystallization. A detailed section on Raman spectroscopy is included as it represents a powerful tool to identify any carbon form, from amorphous to perfectly crystalline,

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Section: Patterning: Properties and Limitationsmentioning

confidence: 99%

Metal-Induced Crystallization of Focused Ion Beam-Induced Deposition for Functional Patterned Ultrathin Nanocarbon

Rius

Borrisé

Mestres

2013

Lecture Notes in Nanoscale Science and Technology

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“…Possible routes to minimize the damage caused by the ion beam include milling the polymers at cryogenic temperatures (e.g. −150°C) to reduce local heating (Niihara et al ., 2005; Sezen et al ., 2009; Kim et al ., 2011; Sezen et al ., 2011), applying an electrically conductive coating or using an electron flood gun against ion charging (Stokes et al ., 2007) or removing the polymer at a faster rate using water vapour (Kochumalayil et al ., 2009a, b).…”

Section: Introductionmentioning

confidence: 99%

Three‐dimensional nanofabrication of polystyrene by focused ion beam

Lee

Proust

Alici

et al. 2012

Journal of Microscopy

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SummaryFocused ion beam micromachining provides a maskless and resistless technique for prototyping of structures from thermoplastic polymers, an example being the production of polystyrene microcantilevers with potential applications as micro/nanoelectromechanical systems sensors and actuators. The applicability of FIB technology is, however, often restricted by the damage created by high energy gallium ion bombardment and local beam heating, which can affect the desired properties and limit the minimum achievable size of the fabricated structure. To investigate the ion-induced damage and determine the limitations of the technique for polymer nanofabrication, we have exposed thin polystyrene film to the ion beam at varying ion doses, ion energies and specimen temperatures. Ion doses ranging from 10 16 to 10 18 ions cm −2 show significant gallium implantation, redeposition of sputtered material and chemical degradation in the polymer. Raman results show that the local heating in polymer during milling is severe at room temperature, damaging the aromatic carbon bonding (C = C) in particular. These observations are supported by the results of a beam heating model and Monte Carlo simulations. The chemical degradation caused by local beam heating is found to be significantly reduced by cooling the specimen to −25 • C during milling. This is consistent with observations that reversible and repeatable thermal actuation of a fabricated polystyrene-platinum microcantilever is only observed when the cantilever is prepared at low temperature milling. Using this cooling approach, polymer structures can be fabricated with dimensions as low as 200 nm and still retain a sufficient volume of material unaffected by the ion beam.

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“…To suppress such damaging effects of the ion beam on polymers, special preparation parameters has to be used. [13,14] Otherwise, FIB prepararion at low temperatures down to liquid nitrogen temperature (Cryo-FIB) is an option to reduce thermal input of the gallium ion beam and modification during FIB preparation.…”

Section: Introductionmentioning

confidence: 99%

Cryo‐FIB‐Preparation and Cryo‐SEM Investigation of Gold Nanolayers Used as Absorber for Laser Welding of Polymer Foils

Neuber

Cismak

Heilmann

2010

Macromolecular Symposia

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Summary: The morphology of welded polymer foils was investigated by Scanning Electron Microscopy (SEM) using Focused Ion Beam (FIB) technology for crosssectional preparation. Due to the sensitive structure of the copolymer Ethylene Tetrafluororethylene (ETFE), FIB preparation and SEM investigation were performed at cryo conditions. A gold nanolayer was used as absorber for the laser beam to weld the transparent copolymer foils. The embedding of the gold nanolayer inside the welding seam and its influence on the mechanical stability of the welding seams was demonstrated.

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Focused ion beam (FIB) milling of electrically insulating specimens using simultaneous primary electron and ion beam irradiation

Cited by 33 publications

References 8 publications

Metal-Induced Crystallization of Focused Ion Beam-Induced Deposition for Functional Patterned Ultrathin Nanocarbon

Metal-Induced Crystallization of Focused Ion Beam-Induced Deposition for Functional Patterned Ultrathin Nanocarbon

Three‐dimensional nanofabrication of polystyrene by focused ion beam

Cryo‐FIB‐Preparation and Cryo‐SEM Investigation of Gold Nanolayers Used as Absorber for Laser Welding of Polymer Foils

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