Metal-Induced Crystallization of Focused Ion Beam-Induced Deposition for Functional Patterned Ultrathin Nanocarbon

Abstract

This chapter recapitulates our work based on focused ion beam-induced deposition of ultrathin amorphous carbon (FIBID-C) patterns as a route towards the easy integration of carbon nanomaterials. The use of postdeposition thermal processing causes structural changes, chemical modifi cation, and tuning of functional properties of the as-deposited FIBID-C. Particularly, in combination with metals our approach allows obtaining site-specifi c graphene-like features on insulators. We explore how to convert FIBID-C into functional materials, namely, graphene-like layers or diamond-like coatings, or combination with various metals.First, we provide a general description of FIBID technique to frame the profuse detailed case of carbon deposition of ultrathin carbon micropatterns. Then, the study of the transformation of FIBID-C by thermal processing reveals the unique characteristics of the as-deposited materials and particularities of the metal-induced crystallization. A detailed section on Raman spectroscopy is included as it represents a powerful tool to identify any carbon form, from amorphous to perfectly crystalline,

Focused ion beam as a tool for graphene technology: Structural study of processing sequence by electron microscopy

“…Additional data will be published in Ref. 31. More detailed explanation of the FIBID-C deposition and its processing, as well as FIBID technique related aspects, can be found there.…”

“…Being approximately of 10 nm, therefore, matches the nominal thickness, which is based on the processing conditions (here, deposition time and beam aperture) and as it has been determined by an atomic force microscopy-based calibration of the deposition rate. 31) The transformation resulting from the metal-assisted thermal treatment of the FIBID-C layers (Case 3) is illustrated in Fig. 2.…”