Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy

Gacka, Ewelina; Kunicki, Piotr; Sikora, Andrzej; Bogdanowicz, Robert; Ficek, Mateusz; Gotszalk, Teodor; Rangelow, Ivo W.; Kwoka, Krzysztof

doi:10.1016/j.measurement.2021.110373

Cited by 7 publications

(2 citation statements)

References 69 publications

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“…The FEBID process has already found applications in electronics, e.g. for contact deposition [18], modification of MEMS devices and integration of diamond microparticle with microcantilevers [19] or atomic force microscope functionalisation to improve the magnetic properties metrology [20].…”

Section: Introductionmentioning

confidence: 99%

Electrical, thermal and noise properties of platinum-carbon free-standing nanowires designed as nanoscale resistive thermal devices

Piasecki,

Kwoka,

Gacka

et al. 2023

Nanotechnology

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Platinum-carbon (PtC) composite nanowires were fabricated using focused electron beam induced deposition and postprocessed, and their performance as a nanoscale resistive thermal device (RTD) was evaluated. Nanowires were free-standing and deposited on a dedicated substrate to eliminate the influence of the substrate itself and of the halo effect on the results. The PtC free-standing nanowires were postprocessed to lower their electrical resistance using electron beam irradiation and thermal annealing using Joule heat both separately and combined. Postprocessed PtC free-standing nanowires were characterized to evaluate their noise figure (NF) and thermal coefficients at the temperature range from 30 K to 80 °C. The thermal sensitivity of RTD was lowered with the reduced resistance but simultaneously the NF improved, especially with electron-beam irradiation. The temperature measurement resolution achievable with the PtC free-standing nanowires was 0.1 K in 1 kHz bandwidth.

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Section: Introductionmentioning

confidence: 99%

Electrical, thermal and noise properties of platinum-carbon free-standing nanowires designed as nanoscale resistive thermal devices

Piasecki,

Kwoka,

Gacka

et al. 2023

Nanotechnology

Self Cite

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“…Firstly, conducting an experiment with any chosen friction pair is challenging since the commercially available probes are usually made of silicon or silicon nitride. The use of a probe made entirely of any other material is problematic and a common solution is to attach a tip from a different material to a silicon cantilever [10] or to modify an existing tip [11,12]. In both cases, expensive Focused Ion Beam (FIB) is used, and the tip-cantilever bond and the fragility of cantilevers are still an issue.…”

Section: Introductionmentioning

confidence: 99%

Novel Paradigm in Afm Probe Fabrication: Broadened Range of Stiffness, Materials, and Tip Shapes

Milczarek¹,

Jarząbek²,

Jenczyk³

et al. 2022

SSRN Journal

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Novel type of whisker-tip cantilever based on GaN microrods for atomic force microscopy

et al. 2023

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Focused ion beam-based microfabrication of boron-doped diamond single-crystal tip cantilevers for electrical and mechanical scanning probe microscopy

Cited by 7 publications

References 69 publications

Electrical, thermal and noise properties of platinum-carbon free-standing nanowires designed as nanoscale resistive thermal devices

Electrical, thermal and noise properties of platinum-carbon free-standing nanowires designed as nanoscale resistive thermal devices

Novel Paradigm in Afm Probe Fabrication: Broadened Range of Stiffness, Materials, and Tip Shapes

Novel type of whisker-tip cantilever based on GaN microrods for atomic force microscopy

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