Focused beam scatterometry for deep subwavelength metrology

Brown, Thomas G.; Alonso, Miguel A.; Vella, Anthony; Head, Stephen T.; Gillmer, Steven R.; Ellis, Jonathan D.

doi:10.1117/12.2045651

Cited by 10 publications

(4 citation statements)

References 18 publications

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“…All these images, though which can be used independently and have different spatial resolving power, are compensative to each other to reveal more detailed metrological and structural information about the SUM (Sample Under Measurements). Using the geometric optical coordination system, polarization orientations illustrated and the Jones model [14][15][16][17], one can find that during polarization sweeping, the pixel intensity, I i , depending on the vector sum of two wave fronts of different polarization states from the intrinsic structural anisotropy of the SUM, varies with input polarization angle α. This dependence can be described by Eq.…”

Section: Basic Theory Of Pimimentioning

confidence: 99%

Micro-Line Investigation in Titanium Dioxide Thin Film Coated on TiNi Alloy by Indirect Microscopy

Yadav

2022

Preprint

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Titanium Dioxide thin film was synthesized on Titanium Nickelide alloy by using sol-gel spin coating method. Nowadays, it is a big issue to investigate the micro crack line in any thin film through the optical microscope for character the adhesion. The super-resolution microscope is better for evaluating the adhesion. The surface morphology of the film was studied using Scanning Electron Microscopy (SEM). Recently, only expensive and inconvenient non-optical method such as SEM (Scanning Electron Microscope) and TEM (Transmission Electron Microscope) are available for high resolution services. Here, we are reporting on the investigations of the crack line in titanium dioxide thin film coated on titanium nickelide alloy by Superresolution Parameter Indirect Microscopy Imaging. Furthermore, we found that the crack line can be seen in PIMI images whereas in SEM the crack line not seen clearly even the magnification of SEM is 10000X, which have been demonstrated by comparing the line intensity across the crack.

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Section: Basic Theory Of Pimimentioning

confidence: 99%

Micro-Line Investigation in Titanium Dioxide Thin Film Coated on TiNi Alloy by Indirect Microscopy

Yadav

2022

Preprint

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“…grating parameters. In the arrangement shown in figure 1, the focused light is understood as multiple plane waves pointed at the same spot with different angles of incidence, as described similarly in [17]. After the interaction with the grating, the reflected fields corresponding to all the incoming plane waves add up coherently and create the far-field intensity pattern which is recorded by the CCD camera.…”

Section: Coherent Fourier Scatterometry and The Experimental Setupmentioning

confidence: 99%

Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry

Šiaudinytė

Pereira

2020

Meas. Sci. Technol.

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Optical inspection of periodic nanostructures is a major challenge in the semiconductor industry due to constantly decreasing critical dimensions. In this paper we combine coherent Fourier scatterometry (CFS) with a sectioning mask for subwavelength grating parameter determination. By selecting only the most sensitive regions of the scattered light in the Fourier plane, one can retrieve grating parameters faster and with higher sensitivity than previous approaches. Moreover, the full process of CFS using focused light is explained and implemented in a subwavelength grating regime. The results of using transverse magnetic polarized input fields together with the proposed sectioning mask are presented and compared to the non-mask case.

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“…To circumvent such problems, studies based on wide object fields and far-image fields have been conducted to improve resolution, contrast and ensure that the sample under test is undamaged. One of the prominent directions is to collect the indirect parametric images with subnanometer sensitivity and nanometer resolution by modulating the far-field point spread function with diverse polarization states [10][11][12]. The polarization parametric indirect microscopic imaging (PIMI) method improves the resolving power of optical microscopy by illumination modulation and polarization detection and visualizes the spatial distribution of photon states in the scattering field using the form of multiple polarization parametric images.…”

Section: Introductionmentioning

confidence: 99%

Characterization of near-field emission and structure of an SLD by polarization parametric indirect microscopic imaging

Ni,

Chen,

et al. 2023

J. Phys. D: Appl. Phys.

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In this paper, a novel polarization parametric indirect microscopic imaging (PIMI) method is utilized for the first time to characterize the near-field emission mode and end-face structure of nanoscale semiconductor light-emitting chips. Via polarization modulation and detection of the emitted light from an SLD chip, abundant information including the distinct border of the emission mode, which cannot be seen by the traditional method, is collected and visualized as the form of multi-dimensional photon state distribution images. The polarization property distribution of the emission mode was visualized for the first time. Besides, by concurrent analysis of PIMI images of the end-face structure and emission mode, potential impurities adhered to the emitting facet can be precisely screened and located. The proposed method here has considerable advantages in the characterization of the light-emitting devices, paving a new way for precise, convenient, cost-effective, and large-scale quality inspection in industries.

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Focused beam scatterometry for deep subwavelength metrology

Cited by 10 publications

References 18 publications

Micro-Line Investigation in Titanium Dioxide Thin Film Coated on TiNi Alloy by Indirect Microscopy

Micro-Line Investigation in Titanium Dioxide Thin Film Coated on TiNi Alloy by Indirect Microscopy

Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry

Characterization of near-field emission and structure of an SLD by polarization parametric indirect microscopic imaging

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