Flux Engineering To Control In-Plane Crystal and Morphological Orientation

LaForge, Joshua M.; Ingram, Grayson L.; Taschuk, Michael T.; Brett, Michael

doi:10.1021/cg300469s

Cited by 22 publications

(10 citation statements)

References 61 publications

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“…While e-beam evaporation has been used for the deposition of a large variety of materials, including amorphous and crystalline semiconductors [80,86,106,139,140], metals [29,[141][142][143][144][145][146], oxides [48,79,89,[147][148][149] and even molecular materials [71,103,150], MS has been the most widely used method for the deposition of metals and oxides when control over the crystalline structure and/or surface roughness is an issue.…”

Section: Magnetron Sputteringmentioning

confidence: 99%

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

583

436

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a b s t r a c tThe oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.

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Section: Magnetron Sputteringmentioning

confidence: 99%

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

583

436

View full text Add to dashboard Cite

show abstract

“…Besides control of column tilt angle and degree of porosity, the obtention of films with a specific out-of-plane orientation, as well as in-plane alignment [26,27], is of prime importance for most applications as crystallographic texture plays an important role in the materials' properties. However, the development of texture in OAD films, and the link with the column tilt angle, is not fully understood.…”

Section: Introductionmentioning

confidence: 99%

Texture and Stress Evolution in HfN Films Sputter-Deposited at Oblique Angles

et al. 2019

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In this study, polycrystalline hafnium nitride (HfN) thin films were grown by oblique angle deposition (OAD) technique to investigate the relationship between column tilt angle, texture development and residual stress evolution with varying inclination angle α of the substrate. The films (~1 μm thickness) were grown at various angles (α = 5°, 25°, 35°, 65°, 75°, and 85°) with respect to the substrate normal by reactive magnetron sputtering at 0.3 Pa and 300 °C. The film morphology, crystal structure and residual stress state were characterized by scanning electron microscopy and X-ray diffraction (XRD), including pole figure and sin2ψ measurements. All HfN films had a cubic, NaCl-type crystal structure with an [111] out-of-plane orientation and exhibited a biaxial texture for α ≥ 35°. XRD pole figures reveal that the crystal habit of the grains consists of {100} facets constituting triangular-base pyramids, with a side and a corner facing the projection of the incoming particle flux (indicative of a double in-plane alignment). A columnar microstructure was formed for α ≥ 35°, with typical column widths of 100 nm. It is observed that the column tilt angle β increases monotonously for α ≥ 35°, reaching β = 34° at α = 85°. This variation at microscopic scale is correlated with the tilt angle of the (111) crystallographic planes, changing from −24.8 to 11.3° with respect to the substrate surface. The residual stress changes from strongly compressive (~−5 GPa at α = 5°) to negligible or slightly tensile for α ≥ 35°. The observed trends are compared to previous works of the literature and discussed based on existing crystal growth and stress models, as well as in light of energy and angular distribution of the incident particle flux calculated by Monte Carlo. Importantly, a decrease of the average kinetic energy of Hf particles from 22.4 to 17.7 eV is found with increasing α due to an increase number of collisions.

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“…The overall array morphology is consistent with GLAD growth. The morphologies of the individual nanorods is consistent with a fiber texture resulting from a preferred growth direction, where the exposed facets are the low energy crystalline planes, most likely [34,35]. Quantitative measurements of the SEM images reveal that the average height of the Fe 2 O 3 nanorods is h = 1220 ± 30 nm, and the diameter at the top is D T = 230 ± 50 nm.…”

Section: Morphology and Composition Of The Core-shell Structuresmentioning

confidence: 52%

Fe2O3–TiO2 core–shell nanorod arrays for visible light photocatalytic applications

et al. 2016

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By using the glancing angle deposition technique and post-deposition annealing, Fe 2 O 3-TiO 2 core-shell nanorod arrays with specific crystalline states can be designed and fabricated. The Fe 2 O 3-TiO 2 core-shell samples annealed at temperatures greater than 450°C formed α-Fe 2 O 3 and anatase TiO 2 , and showed higher catalytic efficiency for the degradation of methylene blue (MB) under visible light illumination when compared with pure anatase TiO 2 or α-Fe 2 O 3 nanorod arrays. Solar conversion of carbon dioxide and water vapor in the presence of Fe 2 O 3-TiO 2 coreshell nanorod arrays was also investigated. Carbon monoxide, hydrogen, methane, and methanol along with other hydrocarbons were produced after only several hours' exposure under ambient

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Flux Engineering To Control In-Plane Crystal and Morphological Orientation

Cited by 22 publications

References 61 publications

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Texture and Stress Evolution in HfN Films Sputter-Deposited at Oblique Angles

Fe2O3–TiO2 core–shell nanorod arrays for visible light photocatalytic applications

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