“…Note that, as expected, an increase in the sound velocity causes lower compressibility values. In addition, based on the reported values in the literature at a temperature close to the one used here (29 °C), the obtained compressibility shows a good correspondence with 17 , 42 , which demonstrates the high potential of the proposed device. Fig.…”
Section: Resultssupporting
confidence: 78%
“…Right axis (blue): Compressibility estimation and data published in ref. 17 (orange circles and line) and in ref. 42 (black stars).…”
Section: Resultsmentioning
confidence: 94%
“…There are three main techniques for extracting liquid parameters with MEMS devices: (a) using resonators and evaluating the change in the resonance frequency and resonator quality factor due to the influence of the liquid surrounding the resonator, which modifies the resonant performance (mass added virtual factor 11 – 14 ); (b) using acoustic devices (SAW devices, quartz microbalances, and FBARs), to measure changes in the frequency response 15 , 16 or in a pulse-echo system 17 due to a change in the acoustic impedance load, which depends on the liquid under test; and (c) using acoustic devices that generate a pressure wave and characterize its propagation and sound attenuation inside the liquid 2 , 15 . These three techniques allow the characterization of some but not all parameters.…”
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monolithically fabricated with a 130 nm complementary metal-oxide semiconductor (CMOS) process. The electrode configuration allows the entire system to be implemented in a single device, where one electrode is used as an input and the other as an output. Experimental verification was carried out by exploiting the features of piezoelectric devices such as resonators and acoustic transducers, where a frequency shift and amplitude variation are expected because of a change in density and viscosity. A sensitivity of 482 ± 14 Hz/kg/m3 demonstrates the potential of the system compared to other dual-electrode PMUTs. In addition, according to the acoustic measurement, the sound velocity, fluid compressibility, and viscosity coefficient can be extracted, which, to the best of our knowledge, is novel in these PMUT systems.
“…Note that, as expected, an increase in the sound velocity causes lower compressibility values. In addition, based on the reported values in the literature at a temperature close to the one used here (29 °C), the obtained compressibility shows a good correspondence with 17 , 42 , which demonstrates the high potential of the proposed device. Fig.…”
Section: Resultssupporting
confidence: 78%
“…Right axis (blue): Compressibility estimation and data published in ref. 17 (orange circles and line) and in ref. 42 (black stars).…”
Section: Resultsmentioning
confidence: 94%
“…There are three main techniques for extracting liquid parameters with MEMS devices: (a) using resonators and evaluating the change in the resonance frequency and resonator quality factor due to the influence of the liquid surrounding the resonator, which modifies the resonant performance (mass added virtual factor 11 – 14 ); (b) using acoustic devices (SAW devices, quartz microbalances, and FBARs), to measure changes in the frequency response 15 , 16 or in a pulse-echo system 17 due to a change in the acoustic impedance load, which depends on the liquid under test; and (c) using acoustic devices that generate a pressure wave and characterize its propagation and sound attenuation inside the liquid 2 , 15 . These three techniques allow the characterization of some but not all parameters.…”
In this work, a single cell capable of monitoring fluid density, viscosity, sound velocity, and compressibility with a compact and small design is presented. The fluid measurement system is formed by a two-port AlScN piezoelectric micromachined ultrasonic transducer (PMUT) with an 80 μm length monolithically fabricated with a 130 nm complementary metal-oxide semiconductor (CMOS) process. The electrode configuration allows the entire system to be implemented in a single device, where one electrode is used as an input and the other as an output. Experimental verification was carried out by exploiting the features of piezoelectric devices such as resonators and acoustic transducers, where a frequency shift and amplitude variation are expected because of a change in density and viscosity. A sensitivity of 482 ± 14 Hz/kg/m3 demonstrates the potential of the system compared to other dual-electrode PMUTs. In addition, according to the acoustic measurement, the sound velocity, fluid compressibility, and viscosity coefficient can be extracted, which, to the best of our knowledge, is novel in these PMUT systems.
“…Therefore, there is a new horizon that appears for FBAR in the high-frequency application. Additionally, there are some scholars extensively investigating the capability of the FBAR for several applications such as communication filters [314][315][316][317][318] and chemical detection [257,[319][320][321]. In addition, the researchers are still investigating the FBAR parameters for enhancing the device performance such as the quality factor, coupling coefficient, electromechanical coupling, device geometry, and the figure of merit [261,268,288,[322][323][324][325][326].…”
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.
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