2017
DOI: 10.3390/s17081740
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Flexible Mixed-Potential-Type (MPT) NO2 Sensor Based on An Ultra-Thin Ceramic Film

Abstract: A novel flexible mixed-potential-type (MPT) sensor was designed and fabricated for NO2 detection from 0 to 500 ppm at 200 °C. An ultra-thin Y2O3-doped ZrO2 (YSZ) ceramic film 20 µm thick was sandwiched between a heating electrode and reference/sensing electrodes. The heating electrode was fabricated by a conventional lift-off process, while the porous reference and the sensing electrodes were fabricated by a two-step patterning method using shadow masks. The sensor’s sensitivity is achieved as 58.4 mV/decade a… Show more

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Cited by 6 publications
(3 citation statements)
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“…E-strate ® is made of 3 mol% partially yttria-stabilized zirconia (3YSZ) [ 13 ]. Due to its high dielectric constant, low thermal conductivity, superior mechanical properties, and tolerance to high temperatures, E-strate ® has enabled radio frequency, photonics, chemical sensing, and renewable energy applications [ 14 , 15 , 16 , 17 ]. Various metallization techniques have been investigated on this substrate for device fabrication, while inkjet printing for device fabrication has been relatively unexplored.…”
Section: Introductionmentioning
confidence: 99%
“…E-strate ® is made of 3 mol% partially yttria-stabilized zirconia (3YSZ) [ 13 ]. Due to its high dielectric constant, low thermal conductivity, superior mechanical properties, and tolerance to high temperatures, E-strate ® has enabled radio frequency, photonics, chemical sensing, and renewable energy applications [ 14 , 15 , 16 , 17 ]. Various metallization techniques have been investigated on this substrate for device fabrication, while inkjet printing for device fabrication has been relatively unexplored.…”
Section: Introductionmentioning
confidence: 99%
“…Comparing to the metal oxide semiconductor, catalytic combustion and surface acoustic wave (SAW) gas sensors, the mixed type potential sensor has many advantages including better mechanical properties, chemical stability and thermal stability at high temperatures [9], which make mixed potential sensor work well in the harsh environment such as the automobile exhaust gas after-treatment system [8,10,11,12,13]. Recently, to further improve the performance of the mixed potential sensor effectively, many groups have turned their attention to finding more sensitive materials including single metal oxides, composite perovskite and spinel-type oxides, and also made some good results [14,15]. Researchers used In 2 O 3 as SE had reached a NO 2 response of 126 mV to 100 ppm at 700 °C [16].…”
Section: Introductionmentioning
confidence: 99%
“…The ultrasensitive real-time detection of gaseous chemical analytes is critically important for human safety protection and environmental monitoring [ 1 , 2 , 3 , 4 ]. Among the various hazardous gases, NO 2 , which is mainly emitted from the fossil fuel combustion, is extremely noxious to human beings, and can lead to the photochemical smog and acid rain that threaten both environmental security and personal respiratory tracts [ 5 , 6 , 7 , 8 , 9 ]. Even the exposure of NO 2 that is no more than 1 ppm may irritate the eyes, throat, and nose, and cause headaches or acute pulmonary edema.…”
Section: Introductionmentioning
confidence: 99%