Flexible mirror micromachined in silicon

Vdovin, Gleb; Sarro, P.M.

doi:10.1364/ao.34.002968

Cited by 169 publications

(92 citation statements)

References 5 publications

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“…The electrodes on the back face of the DM consist of a central pad surrounded by four annular rings of electrodes. The central pad and the electrodes in the two inner rings (channels 1-19) are used to generate local curvature in the mirror surface, while the electrodes in the outer ring (channels [20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35] produce a slope at the edge of the DM. The curvature and slope electrodes are separated by the third annular electrode ring identified as the guard ring.…”

Section: Characteristics Of the Aoptix Dmmentioning

confidence: 99%

“…[20], [21] Boston Micromachines MEMS DM 3.3 12x12 220 ±1 [22] To address the failings of current DM technology, new research has focused on using Micro Electro-Mechanical Systems (MEMS) technology to develop a low-cost DM. To date, the only MEMS DM's that have been used in vision science systems are electrostatically-actuated thin-film devices [23,24]. In these devices, the deformable mirror surface is composed of a film of material, such as polycrystalline silicon or silicon nitride, which is suspended above a fixed array of control electrodes.…”

Section: Introductionmentioning

confidence: 99%

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Characterization for vision science applications of a bimorph deformable mirror using phase-shifting interferometry

Horsley

Park

Laut

et al. 2005

Ophthalmic Technologies XV

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The wave front corrector is one of the three key elements in adaptive optics, along with the wave front sensor and the control computer. Low cost, compact deformable mirrors are increasingly available. We have tested the AOptix bimorph deformable mirror, originally developed for ultra-high bandwidth laser communication systems, to determine its suitability for vision science applications, where cornea and lens introduce optical aberrations. Measurements of the dynamic response of the mirror to a step input were obtained using a commercial Laser Doppler Vibrometer (LDV). A computer-controlled Twyman-Green interferometer was constructed to allow the surface height of the deformable mirror to be measured using Phase-Shifting Interferometry as a function of various control voltages. A simple open-loop control method was used to compute the control voltages required to generate aberration mode shapes described by the Zernike polynomials. Using this method, the ability of the deformable mirror to generate each mode shape was characterized by measuring the maximum amplitude and RMS error of each Zernike mode shape up to the fifth radial order. The maximum deformation amplitude was found to diminish with the square of the radial order of the Zernike mode, with a measured deformation of 8 microns and 1.5 microns achieved at the second-order and fifth-order Zernike modes, respectively. This deformation amplitude appears to be sufficient to allow the mirror to correct for aberrations up to the fifth order in the human eye.

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Section: Characteristics Of the Aoptix Dmmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Characterization for vision science applications of a bimorph deformable mirror using phase-shifting interferometry

Horsley

Park

Laut

et al. 2005

Ophthalmic Technologies XV

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“…Since the existing DM technology developed for astronomy is expensive and bulky, recent research has focused on using micro-electromechanical (MEMS) technology to create a more compact, low-cost DM. Several MEMS DM designs have been demonstrated, including: membrane-based (OKO Technologies Inc.) [1]; polysilicon surface-micromachined (Boston Micromachines Inc.) [2]; bulk silicon (Iris AO Inc.) [3]; and piezoelectric monomorphs Jet Propulsion Laboratory [4].…”

Section: Introductionmentioning

confidence: 99%

Characterization of a bimorph deformable mirror using stroboscopic phase-shifting interferometry

Horsley

Park

Laut

et al. 2007

Sensors and Actuators A: Physical

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The static and dynamic characteristics of a bimorph deformable mirror (DM) for use in an adaptive optics system are described. The DM is a 35-actuator device composed of two disks of lead magnesium niobate (PMN), an electrostrictive ceramic that produces a mechanical strain in response to an imposed electric field. A custom stroboscopic phase-shifting interferometer was developed to measure the deformation of the mirror in response to applied voltage. The ability of the mirror to replicate optical aberrations described by the Zernike polynomials was tested as a measure of the mirror's static performance. The natural frequencies of the DM were measured up to 20 kHz using both stroboscopic interferometry as well as a commercial laser Doppler vibrometer (LDV). Interferometric measurements of the DM surface profile were analyzed by fitting the surface with mode-shapes predicted using classical plate theory for an elastically supported disk. The measured natural frequencies were found to be in good agreement with the predictions of the theoretical model.

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“…3,5 These days, electrostatically activated mirrors 6,7 and electromagnetically activated mirrors 8,9 are especially popular. The advantages of these mirrors include their great actuating capabilities, the facility of using a large number of actuators, and their manufacturing based on batch-fabrication; however, their thin deformed mirror membranes make the application in high-power laser systems difficult owing to the challenge of low stress application of high-power coatings and low heat dissipation within the membrane.…”

Section: Introductionmentioning

confidence: 99%

Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror

Reinlein

Appelfelder

Gebhardt

et al. 2013

J. Micro/Nanolith. MEMS MOEMS

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Abstract. This paper reports on the thermomechanical modeling and characterization of a micro-opto-electro-mechanical systems deformable mirror (DM). This unimorph DM offers a low-temperature cofired ceramic substrate with screen-printed piezoceramic actuators on its rear surface and a machined copper layer on its front surface. We present the DM setup, thermomechanical modeling, and hybrid fabrication. The setup of the DM is transferred into a thermomechanical model in ANSYS Multiphysics. The thermomechanical modeling of the DM evaluates and optimizes the mount material and the copper-layer thickness for the loading cases: homogeneous thermal loading and laser-loading of the mirror. Subsequently, the developed and theoretically optimized DM setup is experimentally validated. The homogeneous loading of the optimized design results in a membrane deformation with a rate of −0.2 μm K −1 , whereas the laser loading causes an opposed change with a rate of −0.2 μm W −1 . Therefore, the proposed mirror design is suitable to precompensate laser-generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35-K preheating of the mirror assembly compensates for an absorbed laser power of 1.25 W. Therefore, the novel compensation regime "compound loading" for the suppression of laser-induced deformations is developed and proven.

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Flexible mirror micromachined in silicon

Cited by 169 publications

References 5 publications

Characterization for vision science applications of a bimorph deformable mirror using phase-shifting interferometry

Characterization for vision science applications of a bimorph deformable mirror using phase-shifting interferometry

Characterization of a bimorph deformable mirror using stroboscopic phase-shifting interferometry

Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror

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