Flexible membrane pressure sensor

Lim, Hee C.; Schulkin, Brian; Pulickal, M.J.; Liu, S.; Petrova, Roumiana S.; Thomas, G. A.; Wagner, S.; Sidhu, K.; Federici, John F.

doi:10.1016/j.sna.2004.10.012

Cited by 82 publications

(48 citation statements)

References 7 publications

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“…Due to the superior flexibility of the elastomeric membrane, the sensors were able to detect pressure changes that were as minute as 10 Pascal or less. This ultra-high sensitivity marked a major improvement from previously reported similar works (Gau et al 2009;Lim et al 2005). Moreover, due to the unique properties of elastomer nanocomposite, its usefulness greatly exceeds beyond the sensor examples shown here.…”

Section: Resultssupporting

confidence: 49%

Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation

Liu

Choi

2011

Microsyst Technol

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This work introduces a simple and low-cost microfabrication technique utilizing laser ablation to embed conductive elastomer nanocomposite within an insulating bulk elastomer. Nanocomposite consisting of poly(dimethylsiloxane) and a network of carbon nanotubes functions as a piezoresistive sensor material. Microstructures are embedded with the assist of laser ablation which utilizes a focused laser beam to ablate through a thin polymer film following a path programmed via software. This approach eliminates hardware such as photo-mask or stamp, which offers distinct advantages in reducing fabrication time and cost in prototyping of sensor devices. Various patterns of polymer film and embedded nanocomposite are demonstrated with spatial resolution down to 34 lm. To characterize patterning quality, different fabrication conditions are tested and uniformity (width, thickness) data are measured with optical profiling. Sensor prototypes are demonstrated based on the piezoresistive response of nanocomposite under tensile strain. Strain sensors could detect large-range ([45%) tensile strain with sensing a factor of about 4, showing promising feasibility for various sensing applications.

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Section: Resultssupporting

confidence: 49%

Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation

Liu

Choi

2011

Microsyst Technol

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“…Transparent electronic materials that can be printed on low-cost, flexible, plastic substrates are potentially important for new applications, such as bendable heads-up display devices, see-through structural health monitors, sensors, and steerable antennas. [3][4][5] More advanced systems, such as electronic artificial skins [6] and canopy window displays, will require materials that can also tolerate the high degrees of mechanical flexing (i.e., high strains) needed for integration with complex curvilinear surfaces. Most examples of transparent TFTs (TTFTs) use thin films of inorganic oxides as the semiconducting and conducting layers.…”

mentioning

confidence: 99%

Highly Bendable, Transparent Thin‐Film Transistors That Use Carbon‐Nanotube‐Based Conductors and Semiconductors with Elastomeric Dielectrics

et al. 2006

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We report the use of networks of single-walled carbon nanotubes (SWNTs) with high and moderate coverages (measured as number of tubes per unit area) for all of the conducting (i.e., source, drain, and gate electrodes) and semiconducting layers, respectively, of a type of transparent, mechanically flexible, thin-film transistor (TFT). The devices are fabricated on plastic substrates using layer-by-layer transfer printing of SWNT networks grown using optimized chemical vapor deposition (CVD) procedures. The unique properties of the SWNT networks lead to electrical (e.g., good performance on plastic), optical (e.g., transparent at visible wavelengths), and mechanical (e.g., extremely bendable) characteristics in this "all-tube" TFT that would be difficult, or impossible, to achieve with conventional materials.Invisible circuits based on transparent transistors have broad potential applications in consumer, military, and industrial electronic systems. [1,2] In backlit display devices, for example, transparent active-matrix circuits can increase the aperture ratio and battery life. Transparent electronic materials that can be printed on low-cost, flexible, plastic substrates are potentially important for new applications, such as bendable heads-up display devices, see-through structural health monitors, sensors, and steerable antennas. [3][4][5] More advanced systems, such as electronic artificial skins [6] and canopy window displays, will require materials that can also tolerate the high degrees of mechanical flexing (i.e., high strains) needed for integration with complex curvilinear surfaces. Most examples of transparent TFTs (TTFTs) use thin films of inorganic oxides as the semiconducting and conducting layers. [7][8][9] Although the electrical properties of these oxides can be good (mobilities and conductivities as high as 20 cm 2 V -1 s -1[10] and 4.8 × 10 3 X -1 cm -1 , [11] respectively), their mechanical characteristics are not optimally suited for use in flexible and mechanically robust devices. For example, the tensile fracture strains for ZnO and indium tin oxide (ITO) thin films are less than 0.03 % [12] and 1 %, [13] respectively.Aligned arrays [14] or random networks [15,16] of individual SWNTs represent alternative classes of transparent semiconducting and conducting materials. In networks with high coverages of SWNTs, especially when in the form of small bundles, the metallic tubes (normally present with semiconducting tubes in a 1:2 ratio) form a percolating network that behaves like a conducting "film". [17,18] At moderate coverages, only the semiconducting tubes form such a percolating network and the film shows semiconducting properties. [19] Unlike the oxides, the SWNT films have excellent mechanical properties due to their high elastic moduli (1.36-1.76 TP nm/tube diameter nm) [20] and fracture stresses (100-150 GPa) [21] of the tubes. SWNT-based semiconductors have been used in flexible TFTs. [15,[22][23][24] In one case, solution-deposited SWNT networks also formed the gate electrodes. [25] A...

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“…This could potentially enable a wide variety of applications such as nanoscale strain sensing, flow sensing in nanofluidics, and mechanically tunable optical devices, as well as producing "artificial skin" membranes with local pressure or shape sensitivity. 5,6 We have fabricated single-walled carbon nanotube devices, consisting of a thin film of nanotubes bridging gold electrodes, on elastomeric polydimethylsiloxane ͑PDMS͒ substrates. While monitoring the device resistance, we elongate the nanotubes an order of magnitude more than in previous experiments in which the transport properties were simultaneously observed.…”

mentioning

confidence: 99%

Elastomeric carbon nanotube circuits for local strain sensing

Maune

Bockrath

2006

Applied Physics Letters

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The authors use elastomeric polydimethylsiloxane substrates to strain single-walled carbon nanotubes and modulate their electronic properties, with the aim of developing flexible materials that can sense their local strain. They demonstrate micron-scale nanotube devices that can be cycled repeatedly through strains as high as 20% while providing reproducible local strain transduction via the device resistance. They also compress individual nanotubes and find that they undergo an undulatory distortion with a characteristic spatial period of 100-200 nm, in agreement with continuum elasticity theory. These could potentially be used to create quantum-well superlattices within individual nanotubes, enabling novel devices and applications.

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Flexible membrane pressure sensor

Cited by 82 publications

References 7 publications

Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation

Embedding conductive patterns of elastomer nanocomposite with the assist of laser ablation

Highly Bendable, Transparent Thin‐Film Transistors That Use Carbon‐Nanotube‐Based Conductors and Semiconductors with Elastomeric Dielectrics

Elastomeric carbon nanotube circuits for local strain sensing

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