Elastomeric carbon nanotube circuits for local strain sensing

Maune, Hareem; Bockrath, Marc

doi:10.1063/1.2358821

Cited by 60 publications

(35 citation statements)

References 19 publications

(39 reference statements)

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“…The force and the SWNT resistance w in Figure 5. It is found that the resistance of the SWNT film increased with the applied force and shows a positive piezoresistive coefficient, which agrees with individual SWNT or SWNT bundles [6,9].…”

Section: A Oi De Tatio Testi Gsupporting

confidence: 62%

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Micro tactile sensors with a suspended and oriented single walled carbon nanotube beam embeded in PDMS elastomer

Lü

Yeom

Cui

2009

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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A tactile sensor utilizing a patterned and suspended SWNT film as a sensing element is reported in this paper. Dense and oriented SWNT films were self-assembled using dielectrophoresis through the monitoring of the dc resistance of the film. The SWNT film was patterned by lithography and oxygen plasma etching to form a suspended SWNT beam. PDMS primer was spin-coated on the SWNT structure, and cured to realize a robust tactile sensor. In nanoindentation test, a piezoresistive sensitivity of 5%/mN and a detection limitation of 2 µN were demonstrated. This simple and low temperature fabrication technology is believed to be very promising for flexible tactile sensors and sensor arrays in applications to smart robots, implantable clinic tools, or embedded pressure sensors in microfluidic systems. KEYWORDSTactile sensor, PDMS, Carbon nanotube I TRODUCTIOThe sense of touch is inevitable for many applications such as smart robots, implantable clinical tools, etc. Many tactile sensors with different sensing schemes were investigated [1, 2]. However, typically they have a bulky and complicated sensor structure. Recently, some flexible polymer such as polydimethylsiloxsane (PDMS) elastomer was used as a structural material of tactile sensing for its flexibility and compliance [3,4].Single walled carbon nanotube (SWNT) has been demonstrated with excellent electro-mechanical properties. H. Dai et al. found that the conductance of a SWNT sample can be reduced by two orders of magnitude when deformed by an AFM tip [5]. In general, two types of technologies were reported to utilize the large piezoresistive coefficient of SWNT to realize strain sensors. One approach was to use an individual, several nanotubes or nanotube bundles as the sensing element attached on some MEMS structures. For an example, H. Dai et al. grew SWNTs on a silicon nitride membrane, and the piezoresistive gauge factor of a small-gap semiconducting SWNT was measured as high as 850 [6]. C. Stampfer et al. proposed a nanoscale displacement sensor based on the piezoresistivity of SWNTs, and the gauge factor of an SWNT up to 2900 was extracted [7]. SWNT strain sensors were also fabricated on polymer substrates since a flexible sensor is very attractive in many applications like "artificial skin", etc. N. K. Chang et al. transferred SWNTs from a silicon substrate to a flexible polyethylene substrate, and got a gauge fact of 269 [8]. H. Maune and M.Bockrath deposited SWNTs on a PDMS surface, and the resistance increased from ~50 MΩ to 1 GΩ when the strain was 10% [9]. However, there are two hurdles in these approaches. First, the reproducible deposition and repeatable performance are still under development since the diameters and shapes of SWNT bundles are scattered. Second, an individual SWNT or an SWNT bundle used in literature are electrically too weak (~ 100 nA) to create a significant output signal, and is very easy to be burnt. Another approach was to use composites of SWNTs and polymers as strain sensing elements. K. J. Loh et al. presented an SWNT-polyel...

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Section: A Oi De Tatio Testi Gsupporting

confidence: 62%

“…N. K. Chang et al transferred SWNTs from a silicon substrate to a flexible polyethylene substrate, and got a gauge fact of 269 [8]. H. Maune and M. Bockrath deposited SWNTs on a PDMS surface, and the resistance increased from ~50 MΩ to 1 GΩ when the strain was 10% [9]. However, there are two hurdles in these approaches.…”

Section: Troductiomentioning

confidence: 96%

Micro tactile sensors with a suspended and oriented single walled carbon nanotube beam embeded in PDMS elastomer

Lü

Yeom

Cui

2009

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

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“…[13][14][15] In addition, Maune stretched an SWCNT up to 20% using elastomeric polydimethylsiloxane (PDMS) substrates. 16 An SWCNT network should withstand large strain because it exhibits two advantages compared with a single SWCNT. First, SWCNTs can slide each other under a large strain.…”

mentioning

confidence: 99%

Extremely stretchable all-carbon-nanotube transistor on flexible and transparent substrates

Xia

Cheng

Han

et al. 2014

Applied Physics Letters

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The response of carbon-nanotube (CNT) transistors to large tensile strains has not been studied because of lack of stretchable devices. In this letter, we fabricate extremely stretchable single-wall CNT (SWCNT) conductive coatings on flexible and transparent elastomer substrates. We then measure the mechanical and electrical properties of the coatings and found excellent stretchability (Poisson ratio ≈ 0.31). The sheet resistances of the coatings remain largely unchanged under a large tensile strain. We then construct an active transistor on SWCNT thin films, which serve as active channel and electrodes, with polydimethylsiloxane thin film as the gate dielectric layer. The transistor exhibits excellent mechanical stability, showing no noticeable change (less than 5%) in electrical performance up to a large strain of 22.5%. The stretchable SWCNT thin-film transistor exhibits a current on–off ratio of ∼50 and field-effect mobility of ∼24 cm2 V−1 s−1, with 75% transmissivity in visible wavelength. We also found that on–off ratio increases with increased stretch strain, while mobility initially increases and then decreases with increased stretch strain.

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“…There are two main types of strain known as uniaxial and torsional strain. The uniaxial strain can be applied by stretching a flexible substrate on which the CNT device is fabricated [5]. A CNT electromechanical device under torsional strain has been examined by pressing a pedal that is attached to a suspended CNT channel [6].…”

Section: Introductionmentioning

confidence: 99%

Effect of strain on the performance of MOSFET-like and p–i–n carbon nanotube FETs

Nia

Sheikhi

2009

Solid-State Electronics

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Elastomeric carbon nanotube circuits for local strain sensing

Cited by 60 publications

References 19 publications

Micro tactile sensors with a suspended and oriented single walled carbon nanotube beam embeded in PDMS elastomer

Micro tactile sensors with a suspended and oriented single walled carbon nanotube beam embeded in PDMS elastomer

Extremely stretchable all-carbon-nanotube transistor on flexible and transparent substrates

Effect of strain on the performance of MOSFET-like and p–i–n carbon nanotube FETs

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