2021
DOI: 10.1021/acs.jpcc.1c03701
|View full text |Cite
|
Sign up to set email alerts
|

First-Principles Calculations of Silicon Interstitial Defects at the Amorphous-SiO2/Si Interface

Abstract: The migration barriers and formation energies of the silicon interstitials in an amorphous-SiO2/Si (a-SiO2/Si) interface are investigated in this work. The migration dynamics and energy profiles of the interstitials in the sublayers and the a-SiO2/Si interface are compared using the CI-NEB method. The results indicate that the neutral interstitial defects may migrate into a-SiO2/Si interface via several low-barrier channels, and get trapped at the interface because of the high energy barrier of the reverse mig… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
5
0
3

Year Published

2021
2021
2024
2024

Publication Types

Select...
7

Relationship

1
6

Authors

Journals

citations
Cited by 7 publications
(8 citation statements)
references
References 39 publications
(51 reference statements)
0
5
0
3
Order By: Relevance
“…In this research, the computational methods are very similar to those in the previous studies . All the calculations were performed with the Dmol in the Materials Studio using the DFT. The GGA (generalized gradient approximation)–PBE (Perdew–Burke–Ernzerhof method) functional was used to describe the electron exchange–correlation potential. The double numerical polarized basis set with polarization functions was used to described the wave functions of the valence electron, and a real space cutoff of 0.45 nm was used.…”
Section: Methodsmentioning
confidence: 99%
“…In this research, the computational methods are very similar to those in the previous studies . All the calculations were performed with the Dmol in the Materials Studio using the DFT. The GGA (generalized gradient approximation)–PBE (Perdew–Burke–Ernzerhof method) functional was used to describe the electron exchange–correlation potential. The double numerical polarized basis set with polarization functions was used to described the wave functions of the valence electron, and a real space cutoff of 0.45 nm was used.…”
Section: Methodsmentioning
confidence: 99%
“…Together with the oxygen and hydrogen atoms that are present in the dielectric layer, they can form electrically active complexes [31].…”
Section: Resultsmentioning
confidence: 99%
“…Small external factors can also stimulate the restructuring processes of existing nanoscale complexes and their clusters in semiconductor structures. This is mainly due to the excitation of the electronic subsystems of defects that exist on the silicon surface and at the Si-SiO 2 boundary [30][31][32][33][34][35][36]. In particular, small doses of ionizing radiation can cause the generation of non-equilibrium electrons and holes, which can be captured by defective complexes [30][31][32].…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Разом з тим, технологічні операції виготовлення електронних пристроїв [10,11], експлуатація в екстремальних зовнішніх полях [12] можуть стимулювати створення внутрішніх дефектних комплексів на онові власних точкових дефектів (вакансій та міжвузлових атомів кремнію) [13] та їх подальшу взаємодію з дислокаціями та кластеризацію [14].…”
unclassified